Optical Element

Abstract

An optical element has at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.

1 . An optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction. 
     
     
         2 . The optical element as claimed in  claim 1 , in which the element which dissipates the vibrational energy of the optical element by friction has an additional mass. 
     
     
         3 . The optical element as claimed in  claim 2 , in which the additional mass is connected to the optical element by means of an adhesive. 
     
     
         4 . The optical element as claimed in  claim 2 , in which the additional mass is arranged on a fibrous medium. 
     
     
         5 . The optical element as claimed in  claim 2 , in which the additional mass is surrounded by a fibrous medium. 
     
     
         6 . The optical element as claimed in one of  claims 2  to  5 , in which the additional mass is designed as a ring connected to the optical element. 
     
     
         7 . The optical element as claimed in one of  claims 1  to  6 , in which the element which dissipates the vibrational energy of the optical element by friction is fitted on one or more of those points of the optical element at which the amplitude of the vibration is highest. 
     
     
         8 . The optical element as claimed in one of  claims 1  to  7 , in which the element which dissipates the vibrational energy of the optical element by friction is arranged on the outside of the optical element. 
     
     
         9 . The optical element as claimed in one of  claims 1  to  8 , in which the element which dissipates the vibrational energy of the optical element by friction has no mechanical contact with an element other than the optical element. 
     
     
         10 . The optical element as claimed in one of  claims 1  to  9 , in which the element which dissipates the vibrational energy of the optical element by friction has a container filled with a pourable medium. 
     
     
         11 . The optical element as claimed in  claims 2  and  10 , in which the mass is arranged in the container filled with the pourable medium. 
     
     
         12 . The optical element as claimed in  claim 10 , in which the pourable medium is sand. 
     
     
         13 . The optical element as claimed in  claim 10 , in which the pourable medium is a granular material. 
     
     
         14 . The optical element as claimed in  claim 10 , in which the pourable medium is a powder. 
     
     
         15 . The optical element as claimed in one of  claims 1  to  14 , in which the element which dissipates the vibrational energy of the optical element by friction has a wire cable having a number of individual wires and on the ends of which respective masses are arranged. 
     
     
         16 . The optical element as claimed in one of  claims 1  to  15 , in which the element which dissipates the vibrational energy of the optical element by friction is designed as a tube filled with a pourable medium. 
     
     
         17 . The optical element as claimed in  claim 16 , in which the tube consists of a flexible material. 
     
     
         18 . The optical element as claimed in one of  claims 1  to  17 , in which the element which dissipates the vibrational energy of the optical element by friction is tuned to the natural frequency of the optical element. 
     
     
         19 . A mount component for an optical element having at least one additional element fitted thereon which dissipates the vibrational energy of the mount component by friction. 
     
     
         20 . The mount component as claimed in  claim 19 , in which the element which dissipates the vibrational energy of the mount component by friction has an additional mass. 
     
     
         21 . The mount component as claimed in  claim 20 , in which the additional mass is connected to the mount component by means of an adhesive. 
     
     
         22 . The mount component as claimed in  claim 20 , in which the additional mass is arranged on a fibrous medium. 
     
     
         23 . The mount component as claimed in  claim 20 , in which the additional mass is surrounded by a fibrous medium. 
     
     
         24 . The mount component as claimed in one of  claims 19  to  23 , in which the additional mass is designed as a ring connected to the mount component. 
     
     
         25 . The mount component as claimed in  claim 22 , in which the ring is arranged in an annular cutout in the mount component. 
     
     
         26 . The mount component as claimed in one of  claims 19  to  25 , in which the element which dissipates the vibrational energy of the mount component by friction is fitted on one or more of those points of the mount component at which the amplitude of the vibration is highest. 
     
     
         27 . The mount component as claimed in one of  claims 19  to  26 , in which the element which dissipates the vibrational energy of the mount component by friction is connected exclusively to the mount component to be damped and has no contact with another element. 
     
     
         28 . The mount component as claimed in one of  claims 19  to  27 , in which the element which dissipates the vibrational energy of the mount component by friction is arranged in a cutout in the mount component. 
     
     
         29 . The mount component as claimed in one of  claims 19  to  28 , in which the element which dissipates the vibrational energy of the mount component by friction has a container filled with a pourable medium. 
     
     
         30 . The mount component as claimed in  claims 19  and  29 , in which the mass is arranged in the container filled with the pourable medium. 
     
     
         31 . The mount component as claimed in  claim 29 , in which the pourable medium is sand. 
     
     
         32 . The mount component as claimed in  claim 29 , in which the pourable medium is a granular material. 
     
     
         33 . The mount component as claimed in  claim 29 , in which the pourable medium is a powder. 
     
     
         34 . The mount component as claimed in one of  claims 19  to  33 , in which the element which dissipates the vibrational energy of the mount component by friction is tuned to the natural frequency of the mount component. 
     
     
         35 . A mount for holding an optical element having at least one mount component as claimed in one of  claims 19  to  34 . 
     
     
         36 . The mount having at least two mount components, one of the two mount components having a resilient element that is connected at a contact point to the other mount component and exerts a contact pressure on the latter, an element which dissipates the vibrational energy of the mount by friction being formed by the contact point and the two mount components. 
     
     
         37 . A lithography objective having at least one optical element as claimed in one of  claims 1  to  19 . 
     
     
         38 . A lithography objective having at least one mount as claimed in one of  claims 35  or  36 . 
     
     
         39 . A projection exposure machine having an illumination system and having a lithography objective as claimed in  claim 37  or  38  for producing semiconductor components. 
     
     
         40 . A method for producing semiconductor components by using a projection exposure machine as claimed in  claim 39 .