Composite sensor membrane

Abstract

A sensor may include a membrane to deflect in response to a change in surface stress, where a layer on the membrane is to couple one or more probe molecules with the membrane. The membrane may deflect when a target molecule reacts with one or more probe molecules.

1 . A sensor, comprising:
 a membrane to deflect in response to a change in surface stress; and   a layer on the membrane, the layer to couple one or more probe molecules with the membrane.   
   
   
       2 . The sensor of  claim 1 , further including one or more probe molecules coupled with the membrane. 
   
   
       3 . The sensor of  claim 1 , wherein the membrane includes a first portion fixed to a region of a substrate and a second portion fixed to a different region of the substrate. 
   
   
       4 . The sensor of  claim 1 , wherein the membrane comprises a polymer. 
   
   
       5 . The sensor of  claim 4 , wherein the polymer is chosen from the group consisting of polyimide and parylene. 
   
   
       6 . The sensor of  claim 1 , wherein substantially all of a perimeter region of the membrane is fixed to one or more structures. 
   
   
       7 . The sensor of  claim 1 , wherein the layer comprises a material chosen from the group consisting of gold and silicon dioxide. 
   
   
       8 . The sensor of  claim 1 , wherein a portion of a first side of the membrane is covered by the layer. 
   
   
       9 . The sensor of  claim 8 , wherein the portion is between about 5% and about 90%. 
   
   
       10 . The sensor of  claim 8 , wherein the portion is between about 10% and about 70%. 
   
   
       11 . A system, comprising:
 a substrate;   a membrane coupled with the substrate and spanning a well in the substrate;   a layer on the membrane, the layer to couple one or more probe molecules with the membrane;   another membrane coupled with the substrate and spanning another well in the substrate;   a layer on the another membrane, the layer to couple one or more probe molecules with the membrane;   a cover to enclose the well and the another well;   a channel to provide fluid to the membrane; and   another channel to provide fluid to the another membrane.   
   
   
       12 .- 19 . (canceled) 
   
   
       20 . A method, comprising:
 introducing fluid into a region proximate to a membrane, the fluid including one or more target molecules to be sensed, at least some of the one or more target molecules subsequently interacting with one or more probe molecules coupled with a layer on the membrane and causing a deflection of the membrane; and measuring the deflection of the membrane.   
   
   
       21 . The method of  claim 20 , further including introducing a different fluid into another region proximate a different membrane, the another fluid including one or more different target molecules to be sensed, at least some of the one or more different target molecules subsequently interacting with one or more different probe molecules coupled with a layer on the different membrane and causing a deflection of the different membrane; and measuring the deflection of the different membrane. 
   
   
       22 . The method of  claim 20 , wherein measuring a deflection of the membrane comprises using an electrical detection method. 
   
   
       23 . The method of  claim 22 , wherein the electrical detection method is chosen from the group consisting of a piezoelectric detection method and a piezoresistive detection method. 
   
   
       24 . The method of  claim 20 , wherein measuring a deflection of the membrane comprises reflecting light off the membrane. 
   
   
       25 . The method of  claim 20 , wherein measuring a deflection of the membrane further comprises reflecting light off a reference surface. 
   
   
       26 . The method of  claim 20 , wherein measuring a deflection of the membrane comprises using Fabry-Perot interferometry. 
   
   
       27 . The method of  claim 20 , wherein measuring a deflection of the membrane comprises using Michelson interferometry.