Method for fabricating thin film pattern, device and fabricating method therefor, method for fabricating liquid crystal display, liquid crystal display, method for fabricating active matrix substrate, electro-optical apparatus, and electrical apparatus

Abstract

A method for fabricating a thin film pattern on a substrate, includes the steps of: forming a concave part on the substrate that conforms to the thin film pattern; and applying a function liquid into the concave part.

1 . An electro-optical apparatus comprising a device having a substrate with a thin film pattern fabricated by using a method including:
 building up banks on a surface of the substrate that conform to the thin film pattern;   forming a concave part on the substrate between the banks;   applying a function liquid into the concave part by using a droplet ejection method to form the thin film pattern; and   removing the banks after applying the function liquid,   the concave part being formed by etching, and being formed so as to include a reverse-taper profile gradually widening toward a base of the concave part, and the thin film pattern being formed so as not to protrude from the surface of the substrate.   
   
   
       2 . An electrical apparatus comprising the electro-optical apparatus recited in  claim 1 . 
   
   
       3 . A device comprising:
 a substrate;   a concave part formed on the substrate; and   a thin film pattern disposed in the concave part, wherein   the concave part is formed so as to conform to the thin film pattern.   
   
   
       4 . A device according to  claim 3 , wherein the thin film pattern is formed so as not to protrude from the surface of the substrate. 
   
   
       5 . A device according to  claim 3 , wherein the concave part is formed in a reverse taper shape whose cross section gradually widens towards a bottom thereof. 
   
   
       6 . A device according to  claim 3 , wherein the thin film pattern is formed by a conducting film. 
   
   
       7 . A liquid crystal display comprising:
 two substrates, one of which includes substrate grooves formed thereon and a first conductive pattern formed in the substrate grooves;   a liquid crystal layer interposed between the substrates;   an insulating layer that is formed so as to cover at least the first conductive pattern;   a thin film transistor comprising a thin film semiconductor and disposed on the insulating layer;   transparent banks disposed on the insulating layer; and   a second conductive pattern defined by the transparent banks and disposed on the insulating layer.   
   
   
       8 . A liquid crystal display comprising:
 two substrates, one of which includes substrate grooves formed thereon;   a liquid crystal layer interposed between the substrates; and   at least one layer comprising banks and conductive pattern formed in a region defined by the banks is provided in the substrate groove.   
   
   
       9 . A liquid crystal display comprising:
 two substrates;
 a liquid crystal layer interposed between the substrates; 
 a first conductive layer comprising transparent first banks provided on one of the substrates, and a first conductive pattern provided in a region defined by the first banks; and 
 a first insulating layer provided on the first conductive layer. 
   
   
   
       10 . A liquid crystal display according to  claim 9 , comprising:
 a second conductive layer that comprises a second banks and a second conductive pattern provided on the first insulating layer; and   a second insulating layer provided on the second conductive layer.   
   
   
       11 . An electrical apparatus comprising a liquid crystal display fabricated by using a method including:
 forming a substrate groove in a substrate;   forming a liquid repellent part so as to define the substrate groove;   forming second banks that add further depth to the substrate groove during the forming of the liquid repelling part;   forming a first conductive pattern by ejecting droplets that include a conducting material into the substrate groove from an ejection source;   forming a first insulating layer so as to cover at least the first conductive pattern;   removing the second banks before the forming the first insulating layer;   forming transparent first banks on the first insulating layer that provide a thin film transistor comprising a thin film semiconductor;   forming a second conductive pattern by ejecting droplets that include a conducting material into a formation region defined by the transparent first banks; and   forming a second insulating layer so as to cover at least the transparent first banks and the second conductive pattern,   the substrate groove being formed by etching, and being formed so as to include a forward-taper profile gradually widening toward the ejection source.   
   
   
       12 . An electrical apparatus comprising a liquid crystal display fabricated by using a method including:
 forming a substrate groove in a substrate;   forming first banks within the substrate groove; and   forming a first conductive pattern in the substrate groove by ejecting droplets that include a conducting material into a region defined by the first banks from an ejection source,   the substrate groove being formed by etching and being formed so as to include a forward-taper profile gradually widening toward the ejection source.   
   
   
       13 . An electrical apparatus comprising a liquid crystal display fabricated by using a method including:
 a bank formation step of forming transparent banks on an upper surface of a substrate;   a conductive pattern formation step of forming a first conductive pattern by ejecting droplets that include a conducting material into a formation region defined by the banks; and   an insulating layer formation step of forming a thin film transistor comprising a thin film semiconductor and an insulating layer so as to cover at least the banks and the first conductive pattern.   
   
   
       14 . An electrical apparatus comprising the liquid crystal display according to  claim 7 . 
   
   
       15 . An electrical apparatus comprising the liquid crystal display according to  claim 8 . 
   
   
       16 . An electrical apparatus comprising the liquid crystal display according to  claim 9 .