Alighment apparatus and alignment method thereof

Abstract

An exemplary alignment apparatus ( 20 ) includes a supporting member ( 24 ), a conveyor ( 25 ), and a high-pressure fluid generator ( 21 ). The supporting member is configured for supporting a substrate ( 23 ) having an alignment layer ( 26 ). The conveyor is configured for conveying the supporting member along a predetermined direction. The high-pressure fluid generator is configured for generating and ejecting high-pressure fluid onto a surface of the alignment layer of the substrate to form an alignment surface. Because the alignment apparatus includes the high-pressure fluid generator which can eject high-pressure fluid to impact the surface of the alignment layer in order to form an alignment surface, no debris is introduced. Therefore, the substrates processed by the alignment apparatus can have improved quality and reliability.

1 . An alignment apparatus for treating an unfinished surface, the alignment apparatus comprising:
 a supporting member configured for supporting a substrate having an alignment layer;   a conveyor configured for conveying the supporting member along a predetermined direction; and   a high-pressure fluid generator configured for generating and ejecting high-pressure fluid to impact a surface of the alignment layer of the substrate to form an alignment surface.   
     
     
         2 . The alignment apparatus in  claim 1 , wherein the high-pressure fluid generator comprises a fluid knife, the fluid knife configured to eject high-pressure fluid onto the surface of the alignment layer. 
     
     
         3 . The alignment apparatus in  claim 2 , wherein the fluid knife of the high-pressure fluid generator is rotatable such that an angle between the fluid knife and the substrate is adjustable. 
     
     
         4 . The alignment apparatus in  claim 1 , further comprising a suction unit provided along a peripheral portion of supporting member, the suction unit surrounding the substrate and configured for guiding fluid flows around the substrate. 
     
     
         5 . The alignment apparatus in  claim 1 , wherein the high-pressure fluid comprises at least one of high-pressure gas and high-pressure liquid. 
     
     
         6 . The alignment apparatus in  claim 5 , wherein the high-pressure gas comprises one of nitrogen and air. 
     
     
         7 . The alignment apparatus in  claim 5 , wherein the high-pressure liquid comprises one of purified water and deionized water. 
     
     
         8 . The alignment apparatus in  claim 5 , further comprising an ultrasonic generator, the ultrasonic generator configured for generating and transmitting ultrasonic waves to impact the surface of the alignment layer of the substrate. 
     
     
         9 . The alignment apparatus in  claim 2 , wherein the fluid knife is made of stainless steel. 
     
     
         10 . The alignment apparatus in  claim 1 , wherein the substrate is a glass substrate. 
     
     
         11 . The alignment apparatus in  claim 1 , wherein the material of the alignment layer is selected from the group consisting of polyimide and polyamic acid. 
     
     
         12 . An alignment method for treating an unfinished surface, the method using an alignment apparatus, the alignment apparatus comprising a supporting member, a conveyor, and a high-pressure fluid generator, the method comprising:
 providing a substrate having an alignment layer formed thereon;   placing the substrate on the supporting member;   the conveyor conveying the supporting member along a predetermined direction; and   the high-pressure fluid generator generating and ejecting high-pressure fluid to impact a surface of the alignment layer in order to form an alignment surface.   
     
     
         13 . The alignment method in  claim 12 , wherein a thickness of the alignment layer is in the range from 500˜1000 angstroms. 
     
     
         14 . The alignment method in  claim 12 , wherein the material of the alignment layer is selected from the group consisting of polyimide and polyamic acid. 
     
     
         15 . The alignment method in  claim 12 , wherein the high-pressure fluid comprises at least one of high-pressure gas and high-pressure liquid. 
     
     
         16 . The alignment method in  claim 15 , wherein the high-pressure gas comprises one of nitrogen and air. 
     
     
         17 . The alignment method in  claim 15 , wherein the high-pressure liquid comprises one of purified water and deionized water. 
     
     
         18 . The alignment method in  claim 15 , wherein the alignment apparatus further comprises an ultrasonic generator, and the method further comprises:
 the ultrasonic generator generating and transmitting ultrasonic waves to impact the surface of the alignment layer while the high-pressure fluid generator generates and ejects high-pressure fluid to impact the surface of the alignment layer.   
     
     
         19 . An alignment apparatus for treating an unfinished surface, the alignment apparatus comprising:
 a supporting member configured for supporting a glass substrate having an unfinished alignment layer;   a conveyor configured for conveying the supporting member along a predetermined direction; and   a high-pressure fluid generator configured for generating and ejecting high-pressure fluid to impact a surface of the alignment layer of the substrate to make molecules of the surface of the alignment layer homogeneously align.