US2008252316A1PendingUtilityA1

Membrane probing system

Assignee: CASCADE MICROTECH INCPriority: Feb 25, 2000Filed: Jun 16, 2008Published: Oct 16, 2008
Est. expiryFeb 25, 2020(expired)· nominal 20-yr term from priority
G01R 31/2889G01R 1/0735G01R 1/06772
47
PatentIndex Score
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Claims

Abstract

A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.

Claims

exact text as granted — not AI-modified
1 . A probing assembly comprising:
 (a) a card with conductors supported thereon, including:
 (i) an elongate card signal conductor including an end portion and a first portion having a first edge and a second edge; and 
 (ii) a card guard conductor comprising a first portion spaced apart from said first edge of said first portion of said card signal conductor, a second portion spaced apart from said second edge of said first portion of said signal conductor and a third portion interconnecting said first and said second portions of said guard conductor proximate to, but spaced apart from said end portion of said card signal conductor; and 
   (b) an assembly including a membrane supporting:
 (i) an elongate flexible signal conductor including an end portion and a first portion having a first edge and a second edge; and 
 (ii) a guard conductor comprising a first portion spaced apart from said first edge of said first portion of said signal conductor, a second portion spaced apart from said second edge of said first portion of said signal conductor and a third portion interconnecting said first and said second portions of said guard conductor proximate to, but spaced apart from said end portion of said signal conductor. 
   
   
   
       2 . The probing assembly of  claim 1  wherein said signal conductor includes a portion in conductive contact with said card signal conductor and said guard conductor includes a portion in conductive contact with said card guard conductor. 
   
   
       3 . The probing assembly of  claim 2  wherein said portion of said guard conductor in contact with said card guard conductor contacts said card guard conductor at a location nearer said first edge of said first portion of said card signal conductor than said second edge of said first portion of said card signal conductor. 
   
   
       4 . The probing assembly of  claim 1  wherein at least one of said first portion and said third portion of said guard conductor further comprises a contact region arranged for conductive contact with a portion of said guard conductor, said contact region having a first edge proximate said card signal conductor and a second edge more remote from said card signal conductor than either edge of said first portion of said card guard conductor. 
   
   
       5 . The probing assembly of  claim 1  further comprising:
 (a) a second elongate card signal conductor supported by said card, said second card signal conductor terminating proximate to, but spaced apart from said end portion of said card signal conductor and comprising a portion interposed between, and spaced apart from, said second edge of said card signal conductor and said card guard conductor; and   (b) a second elongate signal conductor supported by a flexible material, said second signal conductor terminating proximate to, but spaced apart from said end portion of said signal conductor and comprising a portion interposed between, and spaced apart from, said second edge of said signal conductor and said guard conductor.   
   
   
       6 . The probing assembly of  claim 5  wherein said signal conductor includes a portion in conductive contact with said card signal conductor; said second signal conductor includes a portion in conductive contact with said second card signal conductor; and said guard conductor includes a portion in conductive contact with said card guard conductor.

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