US2008248213A1PendingUtilityA1

Release layer for imprinted photocationically cured films

55
Assignee: IBMPriority: Mar 30, 2007Filed: Apr 2, 2008Published: Oct 9, 2008
Est. expiryMar 30, 2027(~0.7 yrs left)· nominal 20-yr term from priority
Inventors:Robert David AllenMark Whitney HartFrances Anne HouleHiroshi Ito
B82Y 40/00Y10S977/887G03F 7/0002B82Y 10/00
55
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

An imprint process comprising coating a selected surface of a micropatterned template with a release composition having a basic reactive moiety; wherein the template is transparent to UV radiation; imprinting the template onto a photocationically curable composition; curing the UV curable composition to form an imprinted composition, wherein the release composition having a basic reactive moiety is effective to locally inhibit curing of the composition at an interface between the template and the imprinted composition; and releasing the template from the imprinted composition.

Claims

exact text as granted — not AI-modified
1 . A step and flash imprint process comprising:
 coating a selected surface of a micropatterned template with a release composition having a basic reactive moiety;   imprinting the template onto a photocationically curable composition;   curing the photocationically curable composition to form an imprinted composition, wherein the release composition having the basic reactive moiety is effective to locally inhibit curing of the composition at an interface between the template and the imprinted composition; and   releasing the template from the imprinted composition.   
     
     
         2 . The process of  claim 1 , wherein the photocationically curable composition comprises at least one polymerizable group selected from a group consisting of epoxides, oxetanes, vinyl ethers, and mixtures thereof. 
     
     
         3 . The process of  claim 1 , wherein the release composition having the basic reactive moiety is γ-aminopropyltriethylsiloxane. 
     
     
         4 . The process of  claim 1 , wherein the release composition having the basic reactive moiety is γ-aminopropyltriethylsiloxane and the photocationically curable composition is a vinyl ether. 
     
     
         5 . A step and flash imprint process comprising:
 coating a selected surface of a micropatterned template with γ-aminopropyltriethylsiloxane; wherein the template is transparent to UV radiation;   imprinting the template onto a UV curable vinyl ether photoresist composition;   curing the UV curable vinyl ether photoresist to form a cured vinyl ether composition, wherein the γ-aminopropyltriethylsiloxane is effective to locally inhibit curing of the composition at an interface between the template and the cured vinyl ether composition; and   releasing the template from the UV curable composition.

Join the waitlist — get patent alerts

Track US2008248213A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.