Apparatus for removing a semiconductor workpiece from within a fixture

Abstract

The present invention provides a chucking station apparatus for removing a semiconductor workpiece positioned within a chuck, which includes a retainer member and a support member. The chucking station includes an upper assembly and a lower assembly operably connected to the upper assembly by an actuator assembly. The lower assembly has a receiver that receives the chuck and the workpiece residing between the retainer and support members. When the upper and lower assemblies are in the closed position, a separator element of the lower assembly exerts a force upon an outer periphery of the support member to disengage it from the retainer member. In an open position where the upper and lower assemblies are spaced a distance apart, the support member is disconnected from the retainer member to expose the workpiece. A release assembly of the lower assembly elevates the workpiece to present it for removal from the chucking station. The chucking station can include a vacuum system that provides suction in order to secure the retainer member or the support member to the upper and lower assemblies, respectively.

1 . An apparatus for removing a semiconductor workpiece positioned within a chuck, the apparatus comprising:
 an upper assembly;   a lower assembly operably connected to the upper assembly, the lower assembly having a receiver that receives the chuck and workpiece, the lower assembly further having a separator element; and,   the upper and lower assemblies being moveable between a closed position wherein the separator element exerts a force upon an outer periphery of an upper portion of the chuck to disengage the upper portion from a lower portion, and an open position wherein the upper portion of the chuck is disconnected from the lower portion of the chuck to expose the workpiece for removal from the apparatus.   
   
   
       2 . The apparatus of  claim 1 , wherein the upper assembly includes a plate and a vacuum system that provides suction to the upper assembly, wherein said suction removably secures a portion of the chuck to the plate. 
   
   
       3 . The apparatus of  claim 1 , further comprising an actuator assembly operably connected to the upper and lower assemblies for movement between the open position and the closed position. 
   
   
       4 . The apparatus of  claim 3 , wherein the upper assembly includes a cross member and a plate secured to the cross member, and wherein the cross member is coupled to the actuator assembly. 
   
   
       5 . The apparatus of  claim 4 , wherein the actuator assembly includes a vertical support housing an air cylinder and a rail that slides along the vertical support during movement between the pen and closed positions, and wherein the cross member is connected to the rail. 
   
   
       6 . The apparatus of  claim 1 , wherein the lower assembly includes a vacuum system that provides suction to the lower assembly, wherein said suction removably secures a portion of the chuck to the receiver. 
   
   
       7 . The apparatus of  claim 6 , wherein the vacuum system includes a plurality of ports arrayed along a peripheral region of the receiver. 
   
   
       8 . The apparatus of  claim 7 , wherein the ports include an upper nozzle that is in communication with an upper surface of the receiver. 
   
   
       9 . The apparatus of  claim 7 , wherein the lower plate includes a flange positioned radially outward of the receiver, and wherein the flange includes at least one positional sensor. 
   
   
       10 . The apparatus of  claim 1 , wherein the receiver defines a recessed portion of the lower assembly, wherein the recessed portion has a central opening. 
   
   
       11 . The apparatus of  claim 1 , wherein the separator element resides within a cavity and moves towards the upper assembly to engage and exert said force on the outer periphery of the upper portion of the chuck, and wherein the cavity has an annular configuration and is positioned radially outward of the receiver. 
   
   
       12 . The apparatus of  claim 1 , wherein an inflatable bladder is positioned within the cavity and below the separator element, and wherein the inflatable bladder displaces the separator element into engagement with the upper portion of the chuck. 
   
   
       13 . The apparatus of  claim 1 , wherein the lower assembly includes a release assembly having an inflatable bladder and a pedestal, and wherein in the open position the bladder displaces the pedestal into engagement with the workpiece and elevates the workpiece to present it for removal from the lower assembly. 
   
   
       14 . The apparatus of  claim 13 , wherein the bladder and pedestal reside within a channel positioned radially inward of an outer periphery of the receiver. 
   
   
       15 . The apparatus of  claim 13 , wherein the pedestal has an upper edge with a varying height, and wherein the edge progressively engages discrete peripheral segments of the workpiece to disengage it from a seal of the chuck. 
   
   
       16 . An apparatus for removing a semiconductor workpiece positioned within a chuck, the apparatus comprising:
 a chuck that supports the workpiece during process, the chuck including a support body removably connected to a retainer, the support body having a recess that receives an engaging member of the retainer;   a station having:
 an upper assembly; 
 a lower assembly operably connected to the upper assembly, the lower assembly having a receiver that receives the chuck and workpiece; and, 
 the upper and lower assemblies being moveable between a closed position wherein a separator element of the lower assembly exerts a separation force upon an outer periphery of the support body to disengage the support body from the retainer, and an open position wherein the support body is disconnected from the retainer to expose the workpiece for removal from the receiver and the lower assembly. 
   
   
   
       17 . The apparatus of  claim 16 , wherein an outer diameter of the support body exceeds an outer diameter of the retainer whereby the outer periphery of the support body has a shoulder, and wherein the separator element exerts the separation force upon the shoulder. 
   
   
       18 . The apparatus of  claim 17 , wherein the outer periphery flexes towards the upper assembly when the separator element exerts the separation force on the shoulder to disengage the recess from the engaging member. 
   
   
       19 . The apparatus of  claim 16 , wherein the chuck is positioned in the receiver such that the retainer is positioned adjacent the receiver and the support body faces towards the upper assembly. 
   
   
       20 . The apparatus of  claim 19 , wherein during application of the separation force, the outer periphery of the support body flexes away from the retainer to disengage the recess from the engaging member. 
   
   
       21 . The apparatus of  claim 20 , wherein the outer periphery flexes about an intermediate portion of the support body proximate the recess. 
   
   
       22 . The apparatus of  claim 16 , wherein the support body has a sealing element residing radially outward of the recess, and wherein said sealing element engages an inner surface of the retainer. 
   
   
       23 . The apparatus of  claim 22 , wherein the retainer has a sealing element residing radially inward of the engaging member, and wherein said sealing element engages a back, non-device side of the workpiece. 
   
   
       24 . The apparatus of  claim 16 , wherein the separator element resides within a cavity and moves towards the upper assembly to exert the separation force on the outer periphery of the support body. 
   
   
       25 . The apparatus of  claim 24 , wherein an inflatable bladder is positioned within the cavity and below the separator element, and wherein the inflatable bladder displaces the separator element towards the support body. 
   
   
       26 . The apparatus of  claim 16 , wherein the lower assembly includes a release assembly having an inflatable bladder and a pedestal residing within a channel positioned radially inward of a periphery of the receiver, and wherein in the open position the bladder displaces the pedestal into engagement with the workpiece and elevates the workpiece to present it for removal from the receiver. 
   
   
       27 . The apparatus of  claim 25 , wherein the pedestal has an upper edge with a varying height as measured from a central portion of the pedestal, and wherein the edge progressively engages discrete peripheral segments of the workpiece to disengage it from a seal of the chuck. 
   
   
       28 . The apparatus of  claim 16 , further comprising an actuator assembly operably connected to the upper and lower assemblies for movement between the open position and the closed position. 
   
   
       29 . The apparatus of  claim 28 , wherein the upper assembly includes a cross member and a plate, and wherein the cross member is coupled to the actuator assembly and wherein the support body is removably connected to the plate in the open position. 
   
   
       30 . The apparatus of  claim 28 , wherein the actuator assembly includes an elongated support containing an air cylinder and a rail that slides along the support during movement between the open and closed positions. 
   
   
       31 . An apparatus for removing a semiconductor workpiece positioned within a chuck, the apparatus comprising:
 a chuck having a support member removably connected to a retainer member;   a workpiece positioned within the chuck between the support and retainer members;   a station having an upper assembly, a lower assembly operably and an actuator assembly operably connected to the upper and lower assemblies for movement between an open position and a closed position, wherein the chuck and workpiece reside in the lower assembly in the closed position;   the lower assembly having a separator element that in the closed position exerts a separation force upon an outer periphery of the support member to disengage the support member from the retainer member, and   the lower assembly further having a release pedestal that in the open position elevates the workpiece from the retainer member for removal from the lower assembly.   
   
   
       32 . The apparatus of  claim 31 , wherein the separator element resides within a cavity positioned radially outward of the receiver, and wherein the separator element moves from the cavity to exert the separation force on the outer periphery of the support member. 
   
   
       33 . The apparatus of  claim 32 , wherein an inflatable bladder is positioned within the cavity and below the separator element, and wherein the inflatable bladder displaces the separator element into engagement with the support member. 
   
   
       34 . The apparatus of  claim 31 , wherein the release pedestal resides within a cavity positioned within the receiver, and wherein the release pedestal moves from the cavity to engage and elevate the workpiece. 
   
   
       35 . The apparatus of  claim 34 , wherein an inflatable bladder is positioned within the cavity and below the release pedestal, and wherein the inflatable bladder displaces the release pedestal into engagement with the workpiece. 
   
   
       36 . The apparatus of  claim 35 , wherein the release pedestal has an upper edge with a varying height as measured from a central portion of the pedestal, and wherein the edge progressively engages discrete peripheral segments of the workpiece to disengage it from a seal of the chuck. 
   
   
       37 . The apparatus of  claim 31 , wherein the upper assembly includes a cross member and a plate, and wherein the cross member is coupled to the actuator assembly, and wherein the actuator assembly includes an elongated support containing an air cylinder and a rail that slides along the support during movement between the open and closed positions, and wherein the rail is connected to the upper assembly. 
   
   
       38 . The apparatus of  claim 31 , wherein an outer diameter of the support member exceeds an outer diameter of the retainer member thereby defining a shoulder of the outer periphery of the support member, and wherein the separator element exerts the separation force upon the shoulder. 
   
   
       39 . The apparatus of  claim 31 , wherein the support member has a recess that receives an engaging member of the retainer member, and wherein during application of the separation force, the outer periphery of the support body flexes away from the retainer member to disengage the recess from the engaging member. 
   
   
       40 . The apparatus of  claim 39 , wherein the support body has a sealing element residing radially outward of the recess and said sealing element engages an inner surface of the retainer, and wherein the retainer has a sealing element residing radially inward of the engaging member and said sealing element engages a back, non-device side of the workpiece. 
   
   
       41 . A method for securing a semiconductor workpiece positioned within a chuck, the method comprising the following steps:
 placing the chuck having a support body and a retainer into a chucking station having an upper assembly operably connected to a lower assembly;   placing the workpiece onto the retainer;   moving the upper assembly and the support body into engagement with the lower assembly and the retainer;   connecting the retainer to the support body;   moving the upper assembly from the lower assembly; and   removing the chuck and workpiece from the chucking station.   
   
   
       42 . The method of  claim 41  further comprising the steps of disengaging the retainer from the support body and moving the upper assembly and the support body away from the lower assembly and the retainer before placing the workpiece onto the retainer. 
   
   
       43 . The method of  claim 42  further comprising the step of coupling the support body to the upper assembly before moving the upper assembly and the support body away from the lower assembly and the retainer. 
   
   
       44 . The method of  claim 43 , wherein the step of coupling the support body to the upper assembly comprises applying a vacuum. 
   
   
       45 . The method of  claim 43  further comprising the step of coupling the retainer to the lower assembly before moving the upper assembly and the support body away from the lower assembly and the retainer. 
   
   
       46 . The method of  claim 42 , wherein the step of disengaging the retainer from the support body comprises applying a force to an outer periphery of the support body. 
   
   
       47 . A system for processing a semiconductor workpiece comprising:
 a handling station including a tool having a chucking station that inserts and removes a workpiece within a chuck, the chucking station comprising:
 an upper assembly; 
 a lower assembly operably connected to the upper assembly, the lower assembly having a receiver that receives the chuck and workpiece, the lower assembly further having a separator element; and, 
 the upper and lower assemblies being moveable between a closed position wherein the separator element exerts a force upon an outer periphery of an upper portion of the chuck to disengage the upper portion from a lower portion, and an open position wherein the upper portion of the chuck is disconnected from the lower portion of the chuck to expose the workpiece for removal from the apparatus; 
   a process tool having a process chamber and a drying chamber; and,   a robot that transports workpieces and chucks between the handling station and the process tool.   
   
   
       48 . The system of  claim 47 , wherein the upper assembly includes a plate and a vacuum system that provides suction to the upper assembly, wherein said suction removably secures a portion of the chuck to the plate. 
   
   
       49 . The system of  claim 47 , wherein the separator element resides within a cavity and moves towards the upper assembly to engage and exert said force on the outer periphery of the upper portion of the chuck, and wherein the cavity has an annular configuration and is positioned radially outward of the receiver. 
   
   
       50 . The system of  claim 47 , wherein an inflatable bladder is positioned within the cavity and below the separator element, and wherein the inflatable bladder displaces the separator element into engagement with the upper portion of the chuck. 
   
   
       51 . The system of  claim 47 , wherein the lower assembly includes a release assembly having an inflatable bladder and a pedestal, and wherein in the open position the bladder displaces the pedestal into engagement with the workpiece and elevates the workpiece to present it for removal from the lower assembly. 
   
   
       52 . The system of  claim 51 , wherein the bladder and pedestal reside within a channel positioned radially inward of an outer periphery of the receiver. 
   
   
       53 . The system of  claim 51 , wherein the pedestal has an upper edge with a varying height, and wherein the edge progressively engages discrete peripheral segments of the workpiece to disengage it from a seal of the chuck.