Polishing pad having surface texture

Abstract

The present invention relates to a polishing pad having a surface texture. The surface texture is disposed on the polishing surface of the polishing pad. The surface texture comprises at least one first groove, at least one second groove, and a plurality of holes. The second groove extends from a central portion of the polishing pad to the edge of the polishing pad, and the first groove(s) is intersected with the second groove(s) to form a plurality of intersection points. The holes are disposed at the intersection points, and the depth of the holes is larger than that of the first groove. Thus, the second groove(s) enables impurities suspended in the polishing slurry to be quickly removed from the polishing pad, and the holes can store the polishing slurry to delay the polishing particles in the polishing slurry from departing from the polishing pad.

1 . A polishing pad having a surface texture, comprising:
 a surface texture, comprising:   at least one first groove;   at least one second groove extending from a central portion of the polishing pad to an edge of the polishing pad, wherein the first groove(s) is intersected with the second groove(s) to form a plurality of intersection points; and   a plurality of holes disposed at the intersection points, wherein the holes are blind holes, the depth of the holes is larger than that of the first groove, the diameter of the hole is larger than the width of the first groove and the second groove, and the first groove, the second groove and the holes are on the same surface.   
     
     
         2 . The polishing pad as claimed in  claim 1 , wherein the first groove comprises a plurality of circular grooves with different radii from the top view and the circular grooves are concentric grooves. 
     
     
         3 . The polishing pad as claimed in  claim 1 , wherein the first groove comprises a plurality of rectangular grooves with different side lengths and the rectangular grooves are concentric grooves. 
     
     
         4 . The polishing pad as claimed in  claim 1 , wherein the first groove is a spiral groove from the top view. 
     
     
         5 . The polishing pad as claimed in  claim 1 , wherein the second groove comprises a plurality of radial grooves from the top view. 
     
     
         6 . The polishing pad as claimed in  claim 5 , wherein each of the second grooves is a linear groove. 
     
     
         7 . The polishing pad as claimed in  claim 5 , wherein each of the second grooves is an arced groove. 
     
     
         8 . A polishing pad having a surface texture, comprising:
 a surface texture, comprising:   a plurality of circular grooves with different radii, the circular grooves being concentric grooves;   a plurality of radial grooves, extending from a central portion of the polishing pad to an edge of the polishing pad, wherein the circular grooves are intersected with the radial grooves to form a plurality of intersection points; and   a plurality of the first holes, disposed at the intersection points, wherein the first holes are blind holes, the depth of the first holes is larger than that of the circular grooves, the diameter of the first hole is larger than the width of the circular grooves and the radial grooves, and the circular grooves, the radial grooves and the first holes are on the same surface.   
     
     
         9 . The polishing pad as claimed in  claim 8 , wherein each of the radial grooves is a linear groove. 
     
     
         10 . The polishing pad as claimed in  claim 8 , wherein each of the radial grooves is an arced groove. 
     
     
         11 . The polishing pad as claimed in  claim 8 , further comprising a plurality of the second holes disposed on the circular grooves.