Transport device in an installation for the treatment of substrates

Abstract

The invention concerns a transport device in an installation for the treatment of substrates with a succession of transport segments for the continuous in-line transport of the substrates along a transport line through several treatment sections, wherein a transfer means is provided for positioning one substrate each into a stationary treatment position. The object of the invention is to improve the functionality of a transport device of the generic method to guarantee reduced cycle times. The object is achieved with a transfer means having at least two matching, mobile combination segments, by means of which the substrate is positionable, wherein the combination segments in an alternating assignment to the transport line form a transport segment.

1 . A transport device in an installation, especially vacuum coating installation, for the treatment of substrates with a succession of transport segments for the continuous in-line transport of the substrates along a transport line through several treatment sections, wherein a transfer means is provided for positioning one substrate each into a stationary treatment position, characterized by the fact that: the transfer means has at least two matching, mobile combination segments, by means of which the substrate is positionable, wherein the combination segments in an alternating assignment to the transport line form a transport segment. 
   
   
       2 . A transport device in accordance with  claim 1 , characterized by the fact that: one of the treatment sections has at least one treatment tool, to which is assigned the substrate in the stationary treatment position opposite. 
   
   
       3 . A transport device in accordance with  claim 1 , characterized by the fact that: the combination segments are parallel and spaced apart. 
   
   
       4 . A transport device in accordance with  claim 1 , characterized by the fact that: the combination segments are movable transversely and preferably at right angles to the transport line. 
   
   
       5 . A transport device in accordance with  claim 4 , characterized by the fact that: the combination segments are movable horizontally and/or vertically. 
   
   
       6 . A transport device in accordance with  claim 4 , characterized by the fact that: the transfer means has a roll or gear wheel drive or a sliding gear or belt drive, which is electrically, pneumatically or hydraulically operable. 
   
   
       7 . A transport device in accordance with  claim 1 , characterized by the fact that: one transfer means each is provided in at least two successive treatment sections or is assigned to at least two successive treatment tools. 
   
   
       8 . A transport device in accordance with  claim 1 , characterized by the fact that: the transfer means has a chamber partition, which is arranged in one plane between the combination segments. 
   
   
       9 . A transport device in accordance with  claim 1 , characterized by the fact that: the combination segment is assigned to the treatment tool and/or a substrate holder of the substrate is formed as a chamber partition. 
   
   
       10 . A transport device in accordance with  claim 8 , characterized by the fact that: the chamber partition corresponds to a chamber wall of the treatment section with sealing elements. 
   
   
       11 . A transport device in accordance with  claim 1 , characterized by the fact that: the transport segments are elements of a roll, rail or gas cushion transport device. 
   
   
       12 . A transport device in accordance with  claim 1 , characterized by the fact that: the substrate has a treatment surface, which forms in the case of in-line transport of the substrate along the transport line a transport plane and during positioning of the substrate into the treatment position is aligned in a plane parallel to the transport plane. 
   
   
       13 . A transport device in accordance with  claim 12 , characterized by the fact that: the treatment surface of the substrate is aligned horizontally or essentially vertically. 
   
   
       14 . A transport device in accordance with  claim 1 , characterized by the fact that: the transport device has a rotary module with at least one transport segment, which can be assigned to the transport segments of two treatment sections. 
   
   
       15 . Installation for the treatment, especially coating of substrates, especially a vacuum coating installation with a succession of several treatment stations, characterized by a transfer means in accordance with  claim 1 .