Adjustment mechanism

Abstract

A probe card assembly can comprise a support structure to which a plurality of probes can be directly or indirectly attached. The probes can be disposed to contact an electronic device to be tested. The probe card assembly can further comprise actuators, which can be configured to change selectively an attitude of the support structure with respect to a reference structure. The probe card assembly can also comprise a plurality of lockable compliant structures. While unlocked, the lockable compliant structures can allow the support structure to move with respect to the reference structure. While locked, however, the compliant structures can provide mechanical resistance to movement of the support structure with respect to the reference structure.

1 - 16 . (canceled) 
   
   
       17 : A method of selectively adjusting an attitude of a plurality of probes with respect to terminals of an electronic device to be tested, the method comprising:
 attaching a probe card assembly to a reference structure;   while a lockable compliant structure is unlocked, changing an attitude of a support structure of the probe card assembly with respect to the reference structure, wherein the probes are secured to the support structure and the compliant structure, while unlocked, allows the support structure to move with respect to the reference structure; and   locking the plurality of lockable compliant structures, wherein while locked, each of the lockable compliant structures mechanically resists movement of the compliant structure with respect to the reference structure.   
   
   
       18 : The method of  claim 17  further comprising, prior to the changing an attitude of the support structure, unlocking the plurality of lockable compliant structures. 
   
   
       19 : The method of  claim 17 , wherein the reference structure is part of a test housing comprising a chuck configured to hold the electronic device. 
   
   
       20 : The method of  claim 19 , wherein the probes are attached to a probe substrate assembly, which is attached to the stiffener structure. 
   
   
       21 : The method of  claim 20 , wherein the changing an attitude of a support structure comprises orienting contact tips of the probes to correspond to an orientation of the terminals of the electronic device. 
   
   
       22 : The method of  claim 17 , wherein each of the lockable compliant structures allows at least four degrees of movement of the support structure with respect to the reference structure. 
   
   
       23 : The method of  claim 22 , wherein the four degrees of movement include rotation about three perpendicular axes and translation along at least one of the axes. 
   
   
       24 : The method of  claim 17  further comprising:
 after locking the plurality of lockable compliant structures, effecting contact between ones of the terminals of the electronic device and ones of the probes; and   while the ones of the terminals and the ones of the probes are in contact, testing at least a portion of the electronic device.   
   
   
       25 : The method of  claim 24 , wherein the electronic device comprises a semiconductor wafer comprising a plurality of semiconductor dies. 
   
   
       26 : The method of  claim 25 , wherein, during the testing, the locked lockable compliant structures mechanically resist movement of the support structure. 
   
   
       27 : The method of  claim 17 , wherein, while unlocked, the lockable compliant structure does not appreciably influence the attitude of the support structure with respect to the reference structure. 
   
   
       28 : The method of  claim 17 , wherein, while locked, each lockable compliant structure adds to a mechanical stiffness of the support structure. 
   
   
       29 - 38 . (canceled) 
   
   
       39 : A tool holding assembly comprising:
 a support structure;   a plurality of tools secured to the support structure and disposed to operate on a work piece;   actuators configured to change selectively an attitude of the support structure with respect to a reference structure; and   a plurality of lockable compliant structures, wherein:
 while unlocked, the lockable compliant structures allow the support structure to move with respect to the reference structure, and 
 while locked, the compliant structures mechanically resist movement of the support structure with respect to the reference structure. 
   
   
   
       40 : The assembly of  claim 39 , wherein the tools comprise nozzles for dispensing a material, and the work piece comprises a structure on which the material is to be dispensed. 
   
   
       41 : The assembly of  claim 39 , wherein the work piece comprises an object to be machined, and the tools comprise spindles configured to machine the work piece.