Cantilever for measuring intra-cellular and inter-cellular microspaces

Abstract

A cantilever for measuring intra-cellular and inter-cellular microspaces of the present invention includes a support portion, a lever portion provided to the support portion so as to protrude therefrom, and a probe portion provided near a free end of the lever portion. The probe portion includes a conductive probe made of a carbon-based material, and an insulating film to coat a periphery of the conductive probe.

1 . A cantilever for measuring intra-cellular and inter-cellular microspaces, comprising:
 a support portion;   a lever portion provided to the support portion so as to protrude therefrom; and   a probe portion provided near a free end of the lever portion,   wherein the probe portion includes a conductive probe made of a carbon-based material, and an insulating film to coat a periphery of the conductive probe.   
     
     
         2 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 1 , wherein the carbon-based material of the conductive probe is at least one of single crystal diamond, polycrystalline diamond, nanodiamond, diamondlike carbon, and amorphous carbon. 
     
     
         3 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 2 , wherein the insulating film is one of:
 one layer of any of oxide film, nitride film, and organic film; and   a laminated film including at least one of oxide film, nitride film, and organic film.   
     
     
         4 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 2 , wherein the insulating film is made of a carbon-based material including at least one of polycrystalline diamond, nanodiamond, diamondlike carbon, and amorphous carbon. 
     
     
         5 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 1 , wherein the insulating film is one of:
 one layer of any of oxide film, nitride film, and organic film; and   a laminated film including at least one of oxide film, nitride film, and organic film.   
     
     
         6 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 1 , wherein the insulating film is made of a carbon-based material including at least one of polycrystalline diamond, nanodiamond, diamondlike carbon, and amorphous carbon. 
     
     
         7 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 1 , wherein
 the conductive probe is electrically connected with a wiring portion, and   the wiring portion is formed from a lower portion of the probe portion to a part of the support portion via the lever portion.   
     
     
         8 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 7 , wherein the wiring portion is formed covered by an insulative protection film. 
     
     
         9 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 1 , wherein at least a distal end part of the conductive probe includes a surface-modified portion subjected to a surface treatment to facilitate adhesion of an intra-cellular substance or a substance to be introduced into a cell. 
     
     
         10 . The cantilever for measuring intra-cellular and inter-cellular microspaces according to  claim 9 , wherein the surface-modified portion is formed by being subjected to a surface treatment using any one of hydrogen, oxygen, fluorine, amino acid, silane, organic molecules, and biological molecules.