US2008190928A1PendingUtilityA1

Apparatus having vacuum vessel

57
Assignee: YAHAGI YASUOPriority: Dec 27, 2006Filed: Dec 27, 2007Published: Aug 14, 2008
Est. expiryDec 27, 2026(~0.4 yrs left)· nominal 20-yr term from priority
Inventors:Yasuo YahagiMasayuki KobayashiHiroaki MitoTomohiro KudoTomonori Saeki
H01J 37/16H01J 2237/16H01J 2237/182H01J 37/28H01J 2237/2817H01J 2237/022G01N 33/00
57
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Claims

Abstract

An apparatus having a vacuum vessel that has a mechanism using a lubricant therein and not causing defects and faults to samples introduced into the vacuum vessel even it is an apparatus where lubricating oil or grease is applied is provided. An apparatus having a vacuum vessel that has a mechanism using a lubricant therein such as CD-SEM, in which a lubricant (oil, grease) whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel of an apparatus for evaluating a lubricant after the start of vacuum evacuation and after reaches a quasi-equilibrium state is below 0.09 ng/cm 2 is employed.

Claims

exact text as granted — not AI-modified
1 . An apparatus having a vacuum vessel that includes a mechanism using a lubricant therein,
 wherein, to the mechanism in the vacuum vessel, a lubricant whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel after starting vacuum evacuation and after reaching a quasi-equilibrium state is less than 0.09 ng/cm 2  is used.   
   
   
       2 . The apparatus having the vacuum vessel according to  claim 1 ,
 wherein the lubricant is oil.   
   
   
       3 . The apparatus having the vacuum vessel according to  claim 1 ,
 wherein the lubricant is grease.   
   
   
       4 . The apparatus having the vacuum vessel according to  claim 1 ,
 wherein the surface of the material is an element surface of a crystal oscillator.   
   
   
       5 . An apparatus having a vacuum vessel that includes a mechanism using a lubricant therein,
 wherein, in the mechanism of the vacuum vessel, a lubricant whose adsorption amount per minute to a surface of a material introduced into the vacuum vessel after starting vacuum evacuation and after reaching nearly a quasi-equilibrium state is less than 0.09 ng/cm 2  is used.   
   
   
       6 . The apparatus having the vacuum vessel according to  claim 5 ,
 wherein the lubricant is oil.   
   
   
       7 . The apparatus having the vacuum vessel according to  claim 5 ,
 wherein the lubricant is grease.   
   
   
       8 . The apparatus having the vacuum vessel according to  claim 5 ,
 wherein the surface of the material is an element surface of a crystal oscillator.

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