Accessing data from diverse semiconductor manufacturing applications

Abstract

Data extraction for semiconductor process analysis may be implemented across multiple databases. A user may select a given level of interest, such as a wafer, a lot, or a die, and may extract specified information across more than one database if desired. The databases may include separate information such as process control information, electrical, and sort test information. Instead of coalescing the databases into one extremely unmanageable database, data can be extracted horizontally across those databases using structured queries.

1 . a method comprising:
 extracting information for engineering analysis of a semiconductor processing operation across a plurality of databases.   
   
   
       2 . The method of  claim 1  including extracting information from a database including process control information and another database including work in process history information. 
   
   
       3 . The method of  claim 1  including extracting information from at least two databases including at least two of the following: work in process history information, process control information, sort data, or electrical test data. 
   
   
       4 . The method of  claim 1  including developing a unique wafer identifier to be used by at least two different databases. 
   
   
       5 . The method of  claim 1  including developing a unique run level identifier that identifies a run including re-working or re-measuring. 
   
   
       6 . The method of  claim 1  including providing a process batch identifier that changes when a new process operation is done and not when a metrology operation is done. 
   
   
       7 . The method of  claim 1  including enabling the selection of a level for data extraction including at least one of a lot level, a wafer level, or a die level. 
   
   
       8 . The method of  claim 1  including enabling the selection of a particular database for data extraction. 
   
   
       9 . The method of  claim 1  including providing a list of material selections to select for data extraction across at least two domains. 
   
   
       10 . The method of  claim 1  including allowing the selection of one of at least two data join strategies. 
   
   
       11 . A computer readable medium storing instructions to cause a processor-based system to:
 extract information for engineering analysis of a semiconductor processing operation across a plurality of databases.   
   
   
       12 . The medium of  claim 11  further storing instructions to extract information from a database including process control information and from another database including work in process history information. 
   
   
       13 . The medium of  claim 11  further storing instructions to extract information from at least two databases including at least two of the following: work in process history information, process control information, sort data, or electrical test data. 
   
   
       14 . The medium of  claim 11  further storing instructions to develop a unique way for an identifier to be used by at least two different databases. 
   
   
       15 . The medium of  claim 11  further storing instructions to develop a unique run level identifier to identify a run including re-working or re-measuring. 
   
   
       16 . The medium of  claim 11  further storing instructions to provide a process batch identifier that changes when a new process operation is done and not when a metrology operation is done. 
   
   
       17 . The medium of  claim 11  further storing instructions to enable the selection of a level for data extraction including at least one of a lot level, a wafer lever, or a die level. 
   
   
       18 . The medium of  claim 11  further storing instructions to enable the selection of a particular database for data extraction. 
   
   
       19 . The medium of  claim 11  further storing instructions to provide a list of material selections to select for data extraction across at least two domains. 
   
   
       20 . The medium of  claim 11  further storing instructions to allow the selection of one of at least two data join strategies. 
   
   
       21 . A system comprising:
 a data extraction tool to extract information for engineering analysis of a semiconductor processing operation across a plurality of databases; and   a database adaptor to translate information from different databases to a generic schema.   
   
   
       22 . The system of  claim 21  coupled to a plurality of databases. 
   
   
       23 . The system of  claim 22  including databases for at least two of work in process history information, process control information, sort data, and electrical test data. 
   
   
       24 . The system of  claim 21  wherein data can be obtained from more than one database in the form of a run level identifier that identifies a run as including re-working or re-measuring. 
   
   
       25 . The system of  claim 21  wherein said data extraction tool includes a unique wafer identifier that is used in at least two different databases.