Calibration of high speed loader to substrate transport system

Abstract

In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.

1 . A method of calibrating a substrate carrier loader to a moving conveyor comprising:
 providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor;   aligning the substrate carrier loader to the moving conveyor; and   calibrating the substrate carrier loader to the moving conveyor.   
   
   
       2 . The method of  claim 1  wherein the substrate carrier loader is further adapted to unload substrate carriers from the moving conveyor. 
   
   
       3 . The method of  claim 1  further comprising testing operation of the substrate carrier loader. 
   
   
       4 . The method of  claim 3  wherein testing operation of the substrate carrier loader includes operating the substrate carrier loader to place a substrate carrier on at least one carrier support member of the moving conveyor. 
   
   
       5 . The method of  claim 4  wherein testing operation of the substrate carrier loader further comprises operating the substrate carrier loader to remove a substrate carrier from at least one carrier support member of the moving conveyor. 
   
   
       6 . The method of  claim 4  wherein testing operation of the substrate carrier loader further comprises loading a substrate carrier on a docking station or a substrate carrier storage location. 
   
   
       7 . The method of  claim 1  further comprising placing the substrate carrier loader into service such that the substrate carrier loader may load substrate carriers onto and remove substrate carriers from the moving conveyor. 
   
   
       8 . The method of  claim 1  wherein aligning the substrate carrier loader to the moving conveyor comprises:
 establishing a footprint position of the substrate carrier loader;   establishing a level of the substrate carrier loader at the footprint position; and   establishing a frame height of the substrate carrier loader at the footprint position.   
   
   
       9 . The method of  claim 8  further comprising adjusting a pitch of a travel path of an end effector of the substrate carrier loader based on a pitch of the moving conveyor. 
   
   
       10 . The method of  claim 9  wherein adjusting a pitch of a travel path of an end effector of the substrate carrier loader based on a pitch of the moving conveyor comprises:
 using a sensor to detect a detectable feature of the moving conveyor at a first end of the travel path of the end effector of the substrate carrier loader;   moving the end effector to a second end of the travel path of the end effector; and   adjusting an elevation of the substrate carrier loader at the second end of the travel path of the end effector so that the sensor detects a detectable feature of the moving conveyor at the second end of the travel path of the end effector.   
   
   
       11 . The method of  claim 9  further comprising adjusting a roll of the travel path of the end effector of the substrate carrier loader. 
   
   
       12 . The method of  claim 11  further comprising adjusting a lateral position of the travel path of the end effector of the substrate carrier loader based on a lateral position of the moving conveyor. 
   
   
       13 . The method of  claim 12  wherein adjusting a lateral position of the travel path of the end effector of the substrate carrier loader comprises:
 adjusting a lateral position of the substrate carrier loader at a first end of the travel path of the end effector so that a sensor detects a detectable feature of the moving conveyor at the first end of the travel path of the end effector;   moving the end effector to a second end of the travel path of the end effector; and   adjusting a lateral position of the substrate carrier loader at the second end of the travel path of the end effector so that the sensor detects a detectable feature of the moving conveyor at the second end of the travel path of the end effector.   
   
   
       14 . The method of  claim 11  further comprising adjusting a yaw of the travel path of the end effector of the substrate carrier loader. 
   
   
       15 . The method of  claim 1  wherein calibrating the substrate carrier loader to the moving conveyor comprises determining a vertical zero for an end effector of the substrate carrier loader relative to the moving conveyor, the vertical zero representing a height at which the end effector of the substrate carrier loader is positioned prior to loading a substrate carrier onto the moving conveyor or prior to removing a substrate carrier from the moving conveyor. 
   
   
       16 . The method of  claim 1  wherein calibrating the substrate carrier loader to the moving conveyor comprises determining a horizontal launch offset for an end effector of the substrate carrier loader relative to the moving conveyor, the horizontal launch offset allowing a determination of when the end effector of the substrate carrier loader is to be launched to:
 load a substrate carrier onto the moving conveyor after a position for the substrate carrier on the moving conveyor is located; or   remove a substrate carrier from the moving conveyor after the substrate carrier is located on the moving conveyor.   
   
   
       17 . The method of  claim 1  further comprising calibrating the substrate carrier loader to a docking station of a processing tool. 
   
   
       18 . A method of calibrating a substrate carrier loader to a moving conveyor comprising:
 providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor;   establishing a footprint position of the substrate carrier loader relative to the moving conveyor;   establishing a level of the substrate carrier loader at the footprint position;   establishing a frame height of the substrate carrier loader at the footprint position; and   if needed:
 adjusting a pitch of a travel path of an end effector of the substrate carrier loader based on a pitch of the moving conveyor; 
 adjusting a roll of the travel path of the end effector of the substrate carrier loader; 
 adjusting a lateral position of the travel path of the end effector of the substrate carrier loader based on a lateral position of the moving conveyor; or 
 adjusting a yaw of the travel path of the end effector of the substrate carrier loader. 
   
   
   
       19 . A system comprising:
 a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and   a controller coupled to the substrate carrier loader, the controller adapted to assist in:
 alignment of the substrate carrier loader to the moving conveyor; and 
 calibration of the substrate carrier loader to the moving conveyor. 
   
   
   
       20 . The system of  claim 19  wherein the controller is adapted to detect detectable features of the moving conveyor so as to assist in:
 adjustment of a pitch of a travel path of an end effector of the substrate carrier loader based on a pitch of the moving conveyor; or   adjustment of a lateral position of the travel path of the end effector of the substrate carrier loader based on a lateral position of the moving conveyor.