Defect Image Classifying Method and Apparatus and a Semiconductor Device Manufacturing Process Based on the Method and Apparatus

Abstract

According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image classification method using inspected objects is provided. The method includes defect images obtained from at least one inspected object. Next a set of defect images is classified into a specified category, which has a feature. The defect images are arranged for display according to the feature and then displayed. The arranging of the defect images may also be based on an evaluation value for each defect image. Another embodiment provides a defect image classification method using inspected objects. Defect images are obtained from at least one inspected object. Next the defect images are classified into a plurality of categories and at least two information items for example, a defect distribution diagram showing locations of defects in the inspected object, information associated with a category of the plurality of categories, and a defect size distribution, are displayed.

1 . A defect image classification system for classifying defect images detected by a defect detection device, comprising:
 a display means for displaying plural uncategorized defect images on a screen;   defect categorization means for specifying a defect category of a defect selected from among the plural uncategorized defect images by displaying an image of the selected defect in an area on the screen that is associated with the defect category;   feature calculating means for calculating features from an image of the selected defect having the defect category specified by the defect categorization means; and   rearranging means for rearranging a display order of the plural uncategorized defect images in an area on the screen outside of the area that is associated with the defect category, the display order of the plural uncategorized defect images being based on their similarity with the calculated feature.   
   
   
       2 . A defect image classification system according to the  claim 1 , wherein the display order of the plural uncategorized defect images is further based on defect size, brightness, color, and shape of the plural uncategorized defect images. 
   
   
       3 . A defect image classification system according to the  claim 1 , wherein the display means is further for displaying each of the plural uncategorized defect images with substantially the same scale. 
   
   
       4 . A method for classifying defect images detected by a defect detection device, comprising the steps of:
 displaying plural uncategorized defect images on a screen;   specifying a category of a defect from among the plural uncategorized defect images displayed on the screen by displaying an image of the defect in an area on the screen which is associated with a defect category;   calculating one or more features of the image of the defect specified in the step of specifying; and   arranging a display order of the plural uncategorized defect images displayed on the screen in an area of the screen outside of the area associated with the defect category, wherein the display order is based on similarity with the calculated feature.   
   
   
       5 . A method for classifying defect images according to the  claim 4 , wherein the display order is further based on size, brightness, color, and shape of each of the plural uncategorized defect images. 
   
   
       6 . A method for classifying defect images according to the  claim 4 , wherein in the plural uncategorized defect images are displayed on the screen with substantially equal scale.