Apparatus, method and system for providing enhanced mechanical protection of thin beams

Abstract

An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.

1 . An arrangement for use with a micro-mechanical beam, comprising: a support structure configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. 
   
   
       2 . The arrangement of  claim 1 , wherein the support structure is positioned at a point of a maximum bending of the micro-mechanical beam. 
   
   
       3 . The arrangement of  claim 1 , wherein the support structure is constructed to reduce stiction. 
   
   
       4 . The arrangement of  claim 1 , wherein the support structure includes a rounded contact area. 
   
   
       5 . The arrangement of  claim 1 , wherein the support structure includes a tapered end near a point of attachment with the micro-mechanical beam. 
   
   
       6 . The arrangement of  claim 1 , wherein the support structure is arranged at a point of maximum bending of the micro-mechanical beam and includes a rounded contact area and a tapered end near a point of attachment. 
   
   
       7 . The arrangement of  claim 1 , wherein a shape of the support structure includes at least one of round, cubic, cylindrical, tubular, coil-shaped, quonset-shaped, prism-shaped, pyramid, obelisk, wedge, spherical, prolate spheroid, cone-shaped, catenoid, ellipsoid, paraboloid, conoid, disc-shaped, toroid, serpentine, helix, concave, and convex. 
   
   
       8 . The arrangement of  claim 1 , further comprising: at one additional support structure. 
   
   
       9 . The arrangement of  claim 8 , wherein the support structure and the at least one additional support structure are equal in at least one of length, size, and shape. 
   
   
       10 . The arrangement of  claim 8 , wherein the support structure and the at least one additional support structure are unequal in at least one of length, size, and shape. 
   
   
       11 . A device for use with a micro-mechanical beam, comprising: a protective structure to restrict a bending action of the micro-mechanical beam, and configured to directly attach to the micro-mechanical beam at specific points along the beam. 
   
   
       12 . The device of  claim 11 , wherein the protective structure includes at least two adjacent support structures arranged to touch each upon reaching a predetermined bending action of the micro-mechanical beam and prevent a further bending action of the micro-mechanical beam. 
   
   
       13 . The device of  claim 12 , wherein the at least two adjacent support structures are positioned at points of most severe deflection of the micro-mechanical beam. 
   
   
       14 . The device of  claim 12 , wherein the protective structures are distributed uniformly with an even length along an axis of the micro-mechanical beam. 
   
   
       15 . The device of  claim 12 , wherein the protective structures are distributed non-uniformly along an axis of the micro-mechanical beam. 
   
   
       16 . The device of  claim 15 , wherein the protective structures are distributed with a decreasing length along the axis of the micro-mechanical beam. 
   
   
       17 . The device of  claim 15 , wherein the protective structures are distributed with an increasing length along the axis of the micro-mechanical beam. 
   
   
       18 . The device of  claim 11 , wherein the protective structure restricts the bending action in at least one of a variety of directions and all directions. 
   
   
       19 . An arrangement for use with a micro-mechanical mirror, comprising:
 a micro-mechanical beam attached to the micro-mechanical mirror; and   a support structure attached to the micro-mechanical beam to restrict a bending action of the micro-mechanical beam.   
   
   
       20 - 21 . (canceled)