Dielectric plasma chamber apparatus and method with exterior electrodes

Abstract

A dielectric barrier discharge plasma generator includes a dielectric chamber. The chamber contains or incorporates a solid surface that is to be treated with non-thermal plasma. The dielectric chamber can be substantially sealed and confine an atmosphere therein. An atmosphere control system is provided for controlling the atmosphere within the chamber. At least one or two electrodes are located outside of the dielectric chamber. When actuated by an appropriate source of plasma generating electrical power the electrodes cause the generation of a solid surface modifying non-thermal plasma in a plasma zone within the dielectric chamber. A transport system is provided for moving the electrode and the dielectric chamber relative to one another. A plasma zone is confined within the dielectric chamber adjacent to the electrodes, and remains substantially stationary relative to the electrodes. The dielectric chamber carries the solid surface through the plasma zone. The solid surface remains substantially stationary relative to the dielectric chamber.

1 . A dielectric barrier discharge plasma generator comprising:
 a dielectric chamber comprising dielectric material, said dielectric chamber adapted to being substantially sealed and to confining an atmosphere therein;   an atmosphere control system adapted to controlling said atmosphere;   at least two electrodes located outside of said dielectric chamber and adapted to generating a solid surface modifying non-thermal plasma in said dielectric chamber;   a transport system adapted to moving said electrode and said dielectric chamber relative to one another, said dielectric chamber being adapted to confining a plasma zone therein adjacent to said electrodes with said dielectric material generally between at least one of said electrodes and said plasma zone, said electrodes being adapted to causing said non-thermal plasma to form in said plasma zone and to remain substantially stationary relative to said electrodes, said dielectric chamber being adapted to carrying a solid surface through said plasma zone substantially stationary relative to said dielectric chamber; and   a source of plasma generating electrical energy adapted to supplying said plasma generating electrical energy to said electrodes.   
   
   
       2 . A dielectric barrier discharge plasma generator of  claim 1  wherein said solid surface is part of said dielectric chamber. 
   
   
       3 . A dielectric barrier discharge plasma generator of  claim 1  wherein said solid surface is part of a solid object confined within said dielectric chamber. 
   
   
       4 . A dielectric barrier discharge plasma generator of  claim 1  wherein the outer wall of said dielectric chamber is substantially continuous. 
   
   
       5 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber is one of a plurality of separate dielectric chambers. 
   
   
       6 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber comprises a length of hollow tubing and said transport system is adapted to move said length of hollow tubing past said electrodes, and said solid surface comprises an inside wall of said hollow tubing. 
   
   
       7 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber comprises a container for a solid object and said solid surface is on said solid object. 
   
   
       8 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber is one of a plurality of separate dielectric chambers. 
   
   
       9 . A dielectric barrier discharge plasma generator of  claim 1  wherein said electrode is irregular shaped and adapted to generate said non-thermal plasma to modify the properties of said solid surface in a pattern that is approximately determined by the irregular shape of said electrode. 
   
   
       10 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber includes a plurality of plasma zones. 
   
   
       11 . A dielectric barrier discharge plasma generator of  claim 1  wherein said dielectric chamber being adapted to carrying a plurality of separate solid surfaces through said plasma zone. 
   
   
       12 . A dielectric barrier discharge plasma generator comprising:
 a plurality of separate dielectric chambers, each of said dielectric chambers comprising dielectric material, each of said dielectric chamber adapted to being substantially sealed and to confining therein a controlled atmosphere, a solid surface, and a plasma zone;   at least one electrode located outside of and separate from said dielectric chambers and adapted to generating plasma in said plasma zones, said plasma being adapted to modifying said solid surface, said dielectric material generally being between said electrode and said plasma zone;   a transport system adapted to substantially continuously moving said electrode and said dielectric chambers relative to one another to advance said dielectric chambers substantially one by one into plasma forming relationship with said electrode; and   a source of plasma generating electrical energy adapted to supplying said plasma generating electrical energy to said electrode.   
   
   
       13 . Method of treating a solid surface with a non-thermal plasma comprising:
 selecting an enclosed dielectric chamber having an outer wall comprising dielectric material and having an atmosphere therein, said atmosphere having a pressure and a composition;   placing said solid surface in said dielectric chamber, substantially sealing said dielectric chamber, and adjusting at least one of said pressure or composition to a predetermined value;   supplying at least one electrode, said electrode being operatively connected to a source of plasma generating electrical power, said electrode being adapted to generating said non-thermal plasma in a plasma zone in said dielectric chamber upon application of said plasma generating electrical power;   establishing relative motion between said electrode and said dielectric chamber, said solid surface being substantially stationary with respect to said dielectric chamber, and said plasma zone being substantially stationary with respect to said electrode;   applying said plasma generating electrical power to said electrode, said dielectric material being generally between said electrode and said plasma zone,;   allowing a non-thermal plasma to form in said plasma zone in contact with said solid surface; and   recovering a resulting treated solid surface.   
   
   
       14 . A method of  claim 13  wherein said supplying at least one electrode includes supplying at least two electrodes. 
   
   
       15 . A method of  claim 13  wherein said selecting an enclosed dielectric chamber comprises selecting the hollow interior of an elongated tube and said solid surface is the inside surface of said elongated tubing. 
   
   
       16 . A method of  claim 15  wherein said relative motion is established by pulling said elongated tubing past said electrode. 
   
   
       17 . A method of  claim 13  wherein said relative motion is established by conveying separate dielectric chambers past said electrode. 
   
   
       18 . A method of  claim 17  further comprising providing regulating indicia in association with each said separate chamber and regulating at least said plasma generating electrical power responsive to information derived from said regulating indicia. 
   
   
       19 . A dielectric barrier discharge plasma generator adapted to treating an inside surface of a hollow elongated dielectric tube with non-thermal plasma, said dielectric tube comprising dielectric material and having an inside diameter of less than approximately 10 millimeters, an aspect ratio of at least 10 to 1, and containing an atmosphere having a pressure and a composition, said dielectric barrier discharge plasma generator comprising:
 an atmosphere control system adapted to controlling at least one of said pressure or composition;   a set of electrodes located outside of, separate from, and in plasma generating relationship to said dielectric tube;   a movement system adapted to establishing relative movement between said dielectric tube and said set of electrodes; and   a source of plasma generating electrical energy adapted to supplying plasma generating electrical energy to said set of electrodes.   
   
   
       20 . A method of treating an inside surface of a hollow elongated dielectric tube with non-thermal plasma, said dielectric tube comprising dielectric material and having an inside diameter of less than approximately 10 millimeters, an aspect ratio of at least 10 to 1, and containing an atmosphere having a pressure and a composition, said method comprising:
 selecting an atmosphere control system and controlling at least one of said pressure or composition;   providing a set of electrodes located outside of, separate from, and in plasma generating relationship to said dielectric tube;   establishing relative movement between said dielectric tube and said set of electrodes;   supplying plasma generating electrical energy to said set of electrodes;   allowing plasma to form in said dielectric tube; and   recovering said dielectric tube with a plasma treated inside surface.   
   
   
       21 . A method of  claim 20  wherein said inside diameter is less than approximately 5 millimeters. 
   
   
       22 . Method of separately treating a plurality of solid surfaces in a plurality of separate dielectric chambers with a non-thermal plasma, said dielectric chambers comprising dielectric material and having an atmosphere therein, said atmosphere having a pressure and a composition, said method comprising:
 placing said solid surfaces in separate said dielectric chambers;   providing regulating indicia in association with each said separate dielectric chamber, substantially sealing each said dielectric chamber, and adjusting at least one of said pressure or composition in each of said dielectric chambers to a predetermined value;   supplying at least one electrode, said electrode being operatively connected to a source of plasma generating electrical power, said electrode being adapted to generating said non-thermal plasma in a plasma zone within each said dielectric chamber upon application of said plasma generating electrical power;   establishing relative motion between said electrode and at least one of said plurality of separate dielectric chambers;   regulating at least said plasma generating electrical power separately for each said dielectric chamber responsive to information derived from said regulating indicia, and applying the resulting regulated plasma generating electrical power to said electrode;   allowing a non-thermal plasma to form in said plasma zone in contact with said solid surface; and   recovering a resulting treated solid surface.   
   
   
       23 . A method of  claim 22  further comprising placing a plurality of said solid surfaces in at least one of said separate dielectric chambers. 
   
   
       24 . Method of treating a solid surface in a dielectric chamber with a non-thermal plasma, said dielectric chamber comprising a dielectric material and having an atmosphere therein, said atmosphere having a pressure and a composition, said method comprising:
 placing said solid surface in said dielectric chamber;   providing regulating indicia in association with said dielectric chamber, substantially sealing said dielectric chamber;   supplying at least one electrode, said electrode being operatively connected to a source of plasma generating electrical power, said electrode being adapted to generating said non-thermal plasma in a plasma zone within said dielectric chamber upon application of said plasma generating electrical power;   regulating at least one operating parameter in said plasma zone responsive to information derived from said regulating indicia, and applying the resulting regulated plasma generating electrical power to said electrode;   allowing a non-thermal plasma to form in said plasma zone in contact with said solid surface; and   recovering a resulting treated solid surface.