Padless via and method for making same
Abstract
One disclosed embodiment comprises formation of a padless via in a substrate. The padless via includes a hole through a metal layer blanketing the substrate, as well as the underlying substrate. An inner wall of the padless via hole receives a seed layer of a conductive material. Electrolytic differential plating is then performed, resulting in a preferential accumulation of a conductive plating material on the via inner wall, relative to that deposited on a surface of the substrate. In one embodiment, the differential plating is performed by addition of an organic suppressant to a plating bath.
Claims
exact text as granted — not AI-modified1 . A method for fabricating a via in a substrate, said method comprising:
forming a blanket metal layer on a surface of said substrate; drilling a via hole through said blanket metal layer and said substrate; performing a differential plating so as to preferentially cover an inner wall of said via hole with conductive plating material, relative to said surface of said substrate.
2 . The method of claim 1 further comprising patterning said surface of said substrate to leave at least one conductive tracing electrically connected to said inner wall of said via hole, so as to form a padless via.
3 . The method of claim 1 further comprising applying a seed layer to said inner wall of said via hole prior to said performing said differential plating.
4 . The method of claim 3 wherein said seed layer is applied electrolessly.
5 . The method of claim 3 wherein said seed layer is applied electrolytically.
6 . The method of claim 1 wherein said differential plating is performed electrolytically.
7 . The method of claim 1 wherein said differential plating is performed by addition of an organic suppressant to a plating bath.
8 . The method of claim 1 wherein said differential plating is performed anisotropically.
9 . The method of claim 1 wherein said substrate is a circuit board.
10 . The method of claim 1 wherein said substrate is a die package substrate.
11 . The method of claim 1 wherein said conductive plating material comprises copper.
12 . The method of claim 1 wherein said conductive plating material comprises a copper alloy.
13 . A padless via in a substrate, said padless via comprising:
a via hole having an inner wall, said inner wall having a conductive lining; said conductive lining defining an inner conductive ring at a surface of said substrate, wherein said inner conductive ring is in direct electrical contact with conductive tracings on said surface of said substrate.
14 . The padless via of claim 13 wherein said substrate is a circuit board.
15 . The padless via of claim 13 wherein said substrate is a die package substrate.
16 . The padless via of claim 13 wherein said via hole is partially filled with said conductive lining.
17 . The padless via of claim 13 wherein said via hole is completely filled with said conductive lining.
18 . The padless via of claim 13 wherein said conductive lining comprises copper.
19 . The padless via of claim 13 wherein said conductive lining comprises a copper alloy.
20 . The padless via of claim 13 wherein said conductive lining is formed by differential plating performed by addition of an organic suppressant to a plating bath.Join the waitlist — get patent alerts
Track US2008169124A1 — get alerts on status changes and closely related new filings.
We store only your email — no account needed. See our privacy policy.