US2008160266A1PendingUtilityA1

Metallic coatings on silicon substrates

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Individually held — no corporate assignee on recordPriority: Jan 27, 2004Filed: Jan 14, 2008Published: Jul 3, 2008
Est. expiryJan 27, 2024(expired)· nominal 20-yr term from priority
Inventors:Daniel James BranaganTimothy A. HydeJames R. Fincke
Y10T428/263C22C 45/02Y10T428/31B81B 7/0029Y10T428/24917C23C 14/5806C22C 33/00C22C 33/003B81C 1/00674C23C 14/16
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Claims

Abstract

The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.

Claims

exact text as granted — not AI-modified
1 . A metal coated substrate comprising:
 a substrate having a silicon-comprising surface; and   a metallic coating adhered to at least a portion of the silicon-comprising surface, the metallic coating comprising at least 55% Fe, and from 0% to about 2% C by weight.   
   
   
       2 . The metal coated substrate of  claim 1  wherein the metallic coating further comprises at least one member of the group consisting of C, P, Si, and B. 
   
   
       3 . The metal coated substrate of  claim 11  wherein the metallic coating comprises a metallic material selected from the group consisting of Fe 63 Mo 2 Si 1 , Fe 63 Cr 8 Mo 2 , Fe 63 Mo 2 Al 4 , (Fe 0.8 Cr 0.2 ) 81 B 17 , Fe 63 B 17 Si 1 , Fe 63 Cr 8 Mo 2 C 5 , Fe 63 Mo 2 C 5 , Fe 80 Mo 20 , Fe 63 Cr 8 Mo 2 B 17 , Fe 83 B 17 , Fe 63 B 17 Si 5 , Fe 63 B 17 C 2 , Fe 63 B 17 C 3 Si 3 , (Fe 0.8 Cr 0.2 ) 79 B 17 W 2 C 2 , Fe 63 B 17 C 3 Si 5 , Fe 63 B 17 C 2 W 2 , Fe 63 B 17 C 8 , Fe 63 B 17 C 5 , (Fe 0.8 Cr 0.2 ) 78 Mo 2 W 2 B 12 C 5 Si 1 , Fe 63 B 17 C 5 W 5 , Fe 63 B 17 C 5 Si 5 , (Fe 0.8 Cr 0.2 ) 76 Mo 2 W 2 B 14 C 5 Si 1 , (Fe 0.8 Cr 0.2 ) 73 Mo 2 W 2 B 16 C 4 Si 1 ,Mn 2 , Fe 63 Cr 8 Mo 2 B 17 C 5 , (Fe 0.8 Cr 0.2 ) 75 Mo 2 B 17 C 5 Si 1 , Fe 63 Cr 8 Mo 2 B 17 C 5 Si 1 Al 4 , (Fe 0.8 Cr 0.2 ) 75 W 2 B 17 C 5 Si 1 , Fe 63 B 17 C 5 Si 1 , (Fe 0.8 Cr 0.2 ) 73 Mo 2 W 2 B 17 C 5 Si 1 , (Fe 0.8 Cr 0.2 ) 72 Mo 2 W 2 B 17 C 5 Si 1 Gd 1 , (Fe 0.8 Cr 0.2 ) 71 Mo 2 W 2 B 17 C 5 Si 1 ,Gd 2 , and (Fe 0.8 Cr 0.2 ) 74 Mo 2 W 2 B 17 C 4 Si 1 . 
   
   
       4 . The metal-coated substrate of  claim 1  wherein the silicon-comprising surface comprises a member of the group consisting of monocrystalline silicon, polysilicon, silicon oxide and silicon dioxide. 
   
   
       5 . A silicon-comprising structure comprising:
 a substrate comprising silicon; and   a metallic layer over the substrate, the metallic layer comprising less than or equal to about 2 weight percent carbon and having a hardness of at least about 9.2 GPa.   
   
   
       6 . The structure of  claim 5  wherein the metallic layer comprises metallic glass. 
   
   
       7 . The structure of  claim 5  wherein the metallic layer comprises nanocrystalline microstructure. 
   
   
       8 . The structure of  claim 5  wherein the substrate comprises a silicon surface and wherein the metallic layer is deposited onto the silicon surface. 
   
   
       9 . A protected silicon surface comprising
 a layer of metal material over a silicon surface, the layer of metal material comprising:   at least 55% Fe; and   a hardness of at least about 9.2 GPa.   
   
   
       10 . The protected silicon surface of  claim 9  wherein the silicon surface is planar. 
   
   
       11 . The protected silicon surface of  claim 9  wherein the silicon surface comprises silicon oxide. 
   
   
       12 . The protected silicon surface of  claim 9  wherein the silicon surface is non-planar. 
   
   
       13 . The protected silicon surface of  claim 9  wherein the silicon surface is a patterned surface. 
   
   
       14 . The protected silicon surface of  claim 9  wherein the metal material comprises metallic glass. 
   
   
       15 . The protected silicon surface of  claim 9  wherein the metal material comprises a nanocrystalline grain size. 
   
   
       16 . The protected silicon surface of  claim 9  layer of metal material comprises a thickness of from about 10 Å to about 3 μm.

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