Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template

Abstract

A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.

1 . A nanoimprint lithography template comprising:
 a body having first and second opposed sides with a first surface disposed on said first side, said second side having a recess disposed therein, said body having first and second regions with said second region surrounding said first region and said recess in superimposition with said first region, with a portion of said first surface in superimposition with said first region being spaced-apart from said second side a first distance and a portion of said first surface in superimposition with said second region being spaced-apart from said second side a second distance, with said second distance being greater than said first distance; and   a mold disposed on said first side of said body in superimposition with a portion of said first region.   
     
     
         2 . The template as recited in  claim 1  wherein said recess has a geometric shape selected from a group of geometric shapes consisting of square, rectangular, circular, and elliptical. 
     
     
         3 . The template as recited in  claim 1  wherein said recess comprises a nadir surface, with said portion of said first surface in superimposition with said first region being spaced-apart from said nadir surface a first distance. 
     
     
         4 . The template as recited in  claim 1  wherein said second distance has a magnitude of approximately 0.25 inches. 
     
     
         5 . The template as recited in  claim 1  wherein said first distance has a magnitude of approximately 700 microns. 
     
     
         6 . The template as recited in  claim 1  wherein said first distance has a magnitude in a range of 1 micron to 0.25 inches. 
     
     
         7 . The template as recited in  claim 1  wherein said mold comprises a plurality of protrusions and recessions. 
     
     
         8 . A nanoimprint lithography template comprising:
 a body having first and second opposed sides with a first surface disposed on said first side being substantially planar, said body having first and second regions with said second region surrounding said first region, with a portion of said body in superimposition with said first region having a first thickness and a portion of said body in superimposition with said second region having a second thickness, with said second thickness being greater than said first thickness; and   a mold disposed on said first side in superimposition with a portion of said first region.   
     
     
         9 . The template as recited in  claim 8  wherein said second side of said body has a recess disposed therein, with said recess being in superimposition with said first region of said body. 
     
     
         10 . The template as recited in  claim 9  wherein said recess has a geometric shape selected from a group of geometric shapes consisting of square, rectangular, circular, and elliptical. 
     
     
         11 . The template as recited in  claim 8  wherein said second thickness has a magnitude of approximately 0.25 inches. 
     
     
         12 . The template as recited in  claim 8  wherein said first distance has a magnitude of approximately 700 microns. 
     
     
         13 . The template as recited in  claim 8  wherein said first distance has a magnitude in a range of 1 micron to 0.25 inches. 
     
     
         14 . The template as recited in  claim 8  wherein said mold comprises a plurality of protrusions and recessions. 
     
     
         15 . A nanoimprint lithography system comprising:
 a body having first and second opposed sides with a first surface disposed on said first side, said second side having a recess disposed therein, said body having first and second regions with said second region surrounding said first region and said recess in superimposition with said first region, with a portion of said first surface in superimposition with said first region being spaced-apart from said second side a first distance and a portion of said first surface in superimposition with said second region being spaced-apart from said second side a second distance, with said second distance being greater than said first distance, said body further having a mold disposed on said first side in superimposition with a portion of said first region; and   an actuator coupled to said body to apply a force to said body to bow said first region of said body away from said second side of said body.   
     
     
         16 . The system as recited in  claim 15  further including a plurality of actuators. 
     
     
         17 . The system as recited in  claim 15  wherein said force of said actuator may vary dimensions of said body. 
     
     
         18 . The system as recited in  claim 15  wherein said recess has a geometric shape selected from a group of geometric shapes consisting of square, rectangular, circular, and elliptical. 
     
     
         19 . The system as recited in  claim 15  wherein said actuator is coupled to a periphery of said body. 
     
     
         20 . The system as recited in  claim 15  wherein said recess comprises a nadir surface spaced-apart from said first side and said body comprises a boundary surface defined between said nadir surface and said second side, with said actuator being coupled to said boundary surface.