US2008151365A1PendingUtilityA1

Catadioptric projection objective

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Assignee: ZEISS CARL SMT AGPriority: Jan 14, 2004Filed: Mar 11, 2008Published: Jun 26, 2008
Est. expiryJan 14, 2024(expired)· nominal 20-yr term from priority
Inventors:David ShaferWilhelm UlrichAurelian DodocRudolf Von BuenauHans-Juergen MannAlexander Epple
G02B 17/0856G02B 17/0844G02B 17/0892G03F 7/70225G02B 17/0812G02B 17/08G02B 17/0804
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Claims

Abstract

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

Claims

exact text as granted — not AI-modified
1 . A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
 a first objective part for imaging the pattern provided in the object plane into a first intermediate image;   a second objective part for imaging the first intermediate image into a second intermediate image;   a third objective part for imaging the second intermediate image onto the image plane;   wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image;   pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and   
     all concave mirrors are arranged optically remote from a pupil surface. 
   
   
       2 .- 162 . (canceled)

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