US2008144199A1PendingUtilityA1

Arrangement for mounting an optical component

Assignee: ZEISS CARL SMT AGPriority: Jul 1, 2005Filed: Dec 19, 2007Published: Jun 19, 2008
Est. expiryJul 1, 2025(expired)· nominal 20-yr term from priority
G02B 7/023G03F 7/70825G02B 7/1824G02B 7/004
48
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

Arrangements for mounting an optical element, such as a lens or a mirror, are disclosed.

Claims

exact text as granted — not AI-modified
1 . An arrangement, comprising:
 an optical element having an outer peripheral area and at least three constraint locations arranged at the outer peripheral area of the optical element;   a constraining device having a carrier body; and   elastically resilient elements arranged in the constraining device,   wherein the optical element is constrained via the constraint locations in at least one direction through force-based contact with the elastically resilient elements, and the constraining device constrains the optical element in a statically determinate manner in the carrier body.   
   
   
       2 . The arrangement according to  claim 1 , wherein the optical element is constrained in a direction of the force-based contact via minimal forces exerted by the elastically resilient elements. 
   
   
       3 . The arrangement according to  claim 1 , wherein the optical element is constrained in an axial and/or a tangential direction through force-based contact. 
   
   
       4 . The arrangement according to  claim 1 , wherein the constraint locations comprise protrusions arranged on the optical element. 
   
   
       5 . The arrangement according to  claim 1 , wherein the constraint locations are integral with the optical element. 
   
   
       6 . The arrangement according to one  claim 1 , wherein at each constraint location two coupling locations are provided on which two holding forces can act that serve to hold the optical element in the carrier body. 
   
   
       7 . The arrangement according to  claim 6 , wherein through each coupling location an axial force as well as a tangential force can act on the optical element. 
   
   
       8 . The arrangement according to  claim 1 , wherein at each coupling location an axial force and a force with an arbitrary direction perpendicular to the axis of the optical element can act on the optical element, and the arbitrarily directed forces have lines of action which are not intersecting each other in a single point. 
   
   
       9 . The arrangement according to  claim 1 , wherein the constraint locations are held exclusively via force-based contact. 
   
   
       10 . The arrangement according to  claim 1 , wherein the elastic elements are at least partially surrounded by the carrier body. 
   
   
       11 . The arrangement according to  claim 10 , wherein the elastic elements comprise pre-tensioned compression springs. 
   
   
       12 . The arrangement according to  claim 11 , wherein the compression springs are constraining the protrusions in axial and tangential directions. 
   
   
       13 . The arrangement according to  claim 12 , wherein one or two compression springs are arranged in the tangential direction and one or two compression springs are arranged in the axial direction. 
   
   
       14 . The arrangement according to  claim 11 , wherein the compression springs are pre-tensioned only to an extent that is sufficient to enable the compression springs to absorb shock loads occurring in transporting the optical element. 
   
   
       15 . The arrangement according to  claim 11 , wherein the compression springs are arranged in the carrier body, and the carrier body is held by a monolithically formed hinge. 
   
   
       16 . The arrangement according to  claim 15 , wherein the monolithically formed hinge is implemented as a bipod via two rods or feet. 
   
   
       17 . The arrangement according to  claim 11 , wherein at the constraint locations or in the optical element itself, there are notches or grooves formed in axial and/or tangential and/or radial directions which can serve to connect with the elastically resilient elements. 
   
   
       18 . The arrangement according to  claim 17 , wherein compression springs are received by the notches or grooves. 
   
   
       19 . The arrangement according to  claim 17 , wherein the constraint locations are held by way of the elastic elements in a bracket associated with the constraining device. 
   
   
       20 . The arrangement according to  claim 1 , wherein the optical element is adjustable relative to at least one degree of freedom via piezoelectric or electromagnetic driving device, and the driving device is arranged within the constraining device and/or between the constraining device and the carrier and/or between the optical element and the constraining device. 
   
   
       21 . A device, comprising:
 two arrangements according to  claim 1 , wherein the optical elements of the arrangements are arranged on a single carrier.   
   
   
       22 . An assembly, comprising:
 a constraining device having a carrier body; and
 elastically resilient elements arranged in the constraining device, 
 wherein the assembly is configured so that an optical element having constraining locations at its outer periphery can be constrained via the constraint locations in at least one direction through force-based contact with the elastically resilient elements, and the constraining device can constrain the optical element in a statically determinate manner in the carrier body.

Join the waitlist — get patent alerts

Track US2008144199A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.