MEMS scanner driven by two or more signal lines

Abstract

A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

1 - 39 . (canceled) 
   
   
       40 . A MEMS scanner, comprising:
 a frame;   a scan plate coupled to the frame, the scan plate being able to rotate around at least two axes of rotation;   one or more actuators coupled to the scan plate; and   two or more drive signal lines coupled to the one or more actuators, the number of drive signal lines being less than twice the number of axes of rotation;   whereby rotation of the scan plate around at least one of the axes of rotation is driven through a pair of drive signal lines that also carries a signal for driving the scan plate to rotate around at least a second axis of rotation.   
   
   
       41 . The MEMS scanner of  claim 40 , wherein the number of actuators is less than the number of axes of rotation. 
   
   
       42 . The MEMS scanner of  claim 41 , wherein the scan plate comprises a single body coupled to the frame by a pair of arms that allow rotation in a plurality of axes. 
   
   
       43 . The MEMS scanner of  claim 42 , wherein the one or more actuators consists of a single actuator. 
   
   
       44 . The MEMS scanner of  claim 41 , wherein the scan plate further comprises:
 a gimbal coupled to rotate around a first axis;   a pair of torsion arms coupled to the gimbal; and   an inner scan plate coupled to the pair of torsion arms and allowed to oscillate around a second axis by the pair of torsion arms;   whereby the inner scan plate receives a drive signal through torque transmitted from the gimbal through the pair of torsion arms.   
   
   
       45 . The MEMS scanner of  claim 41 , wherein the scan plate further comprises:
 a gimbal coupled to rotate around a first axis;   a pair of torsion arms coupled to the gimbal; and   an inner scan plate coupled to the pair of torsion arms and allowed to rotate around a second axis by the pair of torsion arms;   whereby the gimbal receives a drive signal through torque transmitted from the inner scan plate through the pair of torsion arms.   
   
   
       46 . The MEMS scanner of  claim 40 , wherein:
 the one or more actuators includes a plurality of actuators wired in series;   the scan plate is characterized by a resonance frequency range and mechanical amplification factor in at least one axis of rotation; and   at least one of the plurality of actuators is responsive to a drive signal having a frequency component corresponding to the resonance frequency range of the scan plate.   
   
   
       47 - 58 . (canceled)