Non-magnetic plate-form particles, method for producing the same, and abrasive, abrasive member and abrasive liquid comprising the same

Abstract

An aqueous solution of a metal salt to an alkaline aqueous solution to forma hydroxide or a hydrate of a metal, and the hydroxide or hydrate of the metal is heated at a temperature of 110 to 300° C. in the presence of water. Then, the hydroxide or hydrate of the metal is filtered and dried and then further heated at a temperature of 300 to 1200° C. in an air to form oxide particles such as the particles of cerium oxide, zirconium oxide, aluminum oxide silicon oxide, iron oxide, etc. Thereby the particles of cerium oxide, zirconium oxide, aluminum oxide silicon oxide, iron oxide, etc. having a plate-form shape and a particle size of from 10 nm to 100 nm in the plate direction of the particle are obtained. The non-magnetic particles, in particular, plate-form oxide particles of the present invention have a uniform particle size distribution, are less sintered or agglomerated, and have good crystallinity.

1 . An abrasive member comprising a support and an abrasive layer which is formed on said support and which comprises a binder and an abrasive dispersed in the binder, wherein said abrasive comprises non-magnetic plate-form particles wherein a particle has a plate-form shape, and a particle size is from 10 nm to 100 nm in the plate direction of the particle. 
     
     
         2 . The abrasive member according to  claim 1 , wherein the non-magnetic plate-form particles are oxide particles. 
     
     
         3 . The abrasive member according to  claim 2 , wherein said oxide particles are at least one kind of oxide particles selected from the group consisting of cerium oxide particles, zirconium oxide particles, aluminum oxide particles, silicon oxide particles and iron oxide particles. 
     
     
         4 . The abrasive member according to  claim 2 , wherein said oxide particles are at least one kind of oxide particles selected from the group consisting of cerium oxide particles, zirconium oxide particles, aluminum oxide particles and silicon oxide particles. 
     
     
         5 . The abrasive member according to  claim 2 , wherein said oxide particles are iron oxide particles at least 50% of which have pores in the thickness direction of the particles. 
     
     
         6 . The abrasive member according to  claim 1 , wherein the plate-form shape of the particle is a polygon. 
     
     
         7 . The abrasive member according to  claim 6 , wherein the plate-form shape of the particle is a hexagon. 
     
     
         8 . The abrasive member according to  claim 6 , wherein the plate-form shape of the particle is a rectangle. 
     
     
         9 . The abrasive member according to  claim 6 , wherein the plate-form shape of the particle is a disc or an elliptic plate.