Closing module for an optical arrangement

Abstract

Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element having a first axis and a holding device that fixes the closing element at least in the direction of the first axis, the holding device being configured for radial clamping of the closing element.

1 . A closing module for an optical arrangement, comprising:
 an optically active closing element having a first axis; and   a holding device that clamps said closing element radially, and fixes said closing element at a point along said first axis.   wherein said closing element and said holding device participate in preventing an ingress of external media into an interior portion of said optical arrangement.   
     
     
         2 . The closing module according to  claim 1 , wherein the holding device is configured to hold the closing element by exerting clamping forces onto the closing element which are disposed in a plane substantially perpendicular to the first axis, respectively. 
     
     
         3 . The closing module according to  claim 1 , wherein the holding device includes a number of holding elements as second contact partners, which are in respective engagement with the closing element as the first contact partner in a contact pairing, and exert, onto said closing element, a clamping force directed substantially towards the first axis. 
     
     
         4 . The closing module according to  claim 3 , wherein a contact pairing having a groove arranged in a circumferential direction of the closing element and an associated projection engaging in the groove is formed in at least one contact area between the closing element as the first contact partner and a holding element as a second contact partner, the groove being formed on one of the contact partners and the projection on the other contact partner. 
     
     
         5 . The closing module according to  claim 4 , wherein the groove is formed on the closing element and the projection on the holding element. 
     
     
         6 . The closing module according to  claim 3 , wherein the first contact partner and the second contact partner are configured such that a contact pairing having two substantially point shaped contact sites is produced. 
     
     
         7 . The closing module according to  claim 3 , wherein the contact pairing is configured such that the clamping force exerted by the holding element acts substantially in the neutral fibre of the closing element. 
     
     
         8 . The closing module according to  claim 3 , wherein at least one first holding element is configured to generate the clamping force in the manner of a resilient mount. 
     
     
         9 . The closing module according to  claim 8 , wherein the first holding element comprises a contact element provided to cooperate with the closing element, and a holding body, the contact element being arranged on the holding body to be resilient in a direction of the clamping force to be exerted on the closing element. 
     
     
         10 . The closing module according to  claim 1 , wherein the holding device is configured for tilting of the first axis of the closing element. 
     
     
         11 . The closing module according to  claim 1 , wherein the closing element is a plane-parallel plate. 
     
     
         12 . The closing module according to  claim 1 , wherein the closing element has a principal plane of extension and the first axis is disposed substantially perpendicularly to the principal plane of extension. 
     
     
         13 . A microlithography device for transferring a pattern formed on a mask onto a substrate, comprising an optical projection system that includes a lens barrel having a closing module for an optical arrangement, wherein said closing module includes:
 an optically active closing element having a first axis; and   a holding device fixing the closing element at least in a direction of the first axis,   wherein the holding device is configured to clamp the closing element radially.   
     
     
         14 . A closing module for an optical arrangement, comprising:
 an optically active closing element having a first axis; and   a holding device that tilts said closing element to orient said first axis, and fixes said closing element at a point along said first axis.   
     
     
         15 . The closing module according to  claim 14 , wherein the holding device includes an inner frame and a number of holding elements connected to the inner frame. 
     
     
         16 . The closing module according to  claim 14 , wherein the closing element is a plane-parallel plate. 
     
     
         17 . The closing module according to  claim 14 , wherein the closing element has a principal plane of extension and the first axis is disposed substantially perpendicularly to the principal plane of extension. 
     
     
         18 . A lens barrel having a closing module according to  claim 14 . 
     
     
         19 . The lens barrel according to  claim 18 , wherein a gap is formed between the closing element and the holding device and a purging device for directing a purging stream of a purging medium through the gap is provided. 
     
     
         20 . The closing module according to  claim 14 , wherein said closing element and said holding device participate in preventing an ingress of matter into an interior portion of said optical arrangement. 
     
     
         21 . The closing module according to  claim 14 , wherein the components of the holding device are at least partially adapted to the closing element with regard to their coefficients of thermal expansion. 
     
     
         22 . A closing module for an optical arrangement, comprising:
 an optically active closing element having a first axis; and   a holding device that clamps said closing element radially, and fixes said closing element at a point along said first axis.   
     
     
         23 . The closing module according to  claim 22 , wherein said closing element and said holding device participate in preventing an ingress of matter into an interior portion of said optical arrangement. 
     
     
         24 . The closing module according to  claim 22 , wherein components of the holding device are at least partially adapted to the closing element with regard to their coefficients of thermal expansion. 
     
     
         25 . A microlithography device for transferring a pattern formed on a mask onto a substrate, comprising an optical projection system that includes a lens barrel according to  claim 18 . 
     
     
         26 . A closing element for a closing module according to  claim 1 . 
     
     
         27 . A holding device for a closing module according to  claim 1 . 
     
     
         28 . A lens barrel having a closing module according to  claim 1 .