Discharge cell for ozonizer

Abstract

Decrease in the ozone concentration that becomes a problem when high purity oxygen is used as a raw material gas is prevented. A high purity alumina substrate having a high screen degree is used as a dielectric. A catalytic substance to hinder the decrease of the ozone concentration is fixed on the surface of the alumina substrate as the dielectric by a baking fixing agent. The baking fixing agent is a glass that becomes a paste form that is capable of powder kneading the catalytic substance and attaching to the surface of the dielectric, fixes the catalytic substance on the surface of the dielectric by hardening by baking, and shows ozone resistance and sputtering resistance under the production of ozone in the discharge gap, and forms a functional film containing a large amount of the catalytic substance and is stable on the surface of the dielectric.

1 . A discharge cell for an ozonizer in which a dielectric is arranged contacting at least one electrode in order to form a discharge gap for generating ozone between a pair of electrodes, wherein a functional substance to hinder a decrease of the ozone concentration is fixed on the surface of the dielectric by a baking fixing agent showing ozone resistance and sputtering resistance under the production of ozone in the discharge gap. 
   
   
       2 . The discharge cell for an ozonizer according to  claim 1 , wherein the functional substance is Ti, W, Sb, Mn, Fe, Co, Ni, V or Zn, or an oxide of these metals (MxOy). 
   
   
       3 . The discharge cell for an ozonizer according to  claim 1 , wherein the baking fixing agent is a glass that becomes a paste form that is capable of powder kneading the functional substance and attaching to the surface of the dielectric, fixes the functional substance on the surface of the dielectric by hardening by baking, and shows ozone resistance and sputtering resistance under the production of ozone in the discharge gap. 
   
   
       4 . The discharge cell for an ozonizer according to  claim 3 , wherein the glass is SiO 2 —Al 2 O 3 —B 2 O 3  based and satisfies SiO 2 : 60 to 70% by weight, Al 2 O 3 : 1 to 10% by weight, and B 2 O 3 : 10 to 20% by weight. 
   
   
       5 . The discharge cell for an ozonizer according to  claim 1 , wherein the dielectric is an alumina sintered plate with a purity of 80% or more.