Disk holder and disk rotating device having the same

Abstract

A disk holder suitable for a disk rotating device of a chemical-mechanical polishing apparatus is provided. The disk holder is provided with a base and a fence. The base has a bearing surface at the bottom for bearing a disk thereon. The fence is connected to the peripheral of the base and extends there-from towards a space above the base. By the additional fence, the disk holder prevents the chippings on the base from being flung away from the base under the influence of a centrifugal force.

1 . A disk holder, suitable for being applied in a disk rotating device of a chemical-mechanical polishing (CMP) apparatus, comprising:
 a base, having a bearing surface at the bottom for bearing a disk; and   a fence, connected to the peripheral of the base and extending there-from towards a space above the base.   
     
     
         2 . The disk holder as claimed in  claim 1 , wherein the base and the fence are integrated as a whole. 
     
     
         3 . The disk holder as claimed in  claim 2 , wherein the fence and the base are made of ABS, plastic or tetrafluoroethylene. 
     
     
         4 . The disk holder as claimed in  claim 1 , wherein the fence extends substantially vertically or slantingly from the peripheral of the base towards the space above the base. 
     
     
         5 . The disk holder as claimed in  claim 1 , wherein the fence extends sequentially along at least two directions from the peripheral of the base towards the space above the base. 
     
     
         6 . The disk holder as claimed in  claim 5 , wherein at least one of the directions is substantially vertical or slanting to the bearing surface. 
     
     
         7 . A disk rotating device, suitable for being applied in a CMP apparatus, comprising:
 a disk holder, comprising:
 a base, having a bearing surface at the bottom for bearing a disk; and 
 a fence, connecting to the peripheral of the base and extending there-from towards a space above the base; 
   a transmission shaft, coupled with the base; and   a motor, coupled with the transmission shaft.   
     
     
         8 . The disk rotating device as claimed in  claim 7 , wherein the base and the fence are integrated as a whole. 
     
     
         9 . The disk rotating device as claimed in  claim 8 , wherein the fence and the base are made of ABS, plastic or tetrafluoroethylene. 
     
     
         10 . The disk rotating device as claimed in  claim 7 , wherein the fence extends substantially vertically or slantingly from the peripheral of the base towards the space above the base. 
     
     
         11 . The disk rotating device as claimed in  claim 7 , wherein the fence extends sequentially along at least two directions from the peripheral of the base towards the space above the base. 
     
     
         12 . The disk rotating device as claimed in  claim 11 , wherein at least one of the directions is substantially vertical or slanting to the bearing surface. 
     
     
         13 . The disk rotating device as claimed in  claim 7 , further comprising:
 a gear box, wherein the motor is coupled to the transmission shaft via the gear box.   
     
     
         14 . The disk rotating device as claimed in  claim 13 , further comprising:
 a coupling, for coupling the transmission shaft with the base.   
     
     
         15 . The disk rotating device as claimed in  claim 14 , wherein the coupling comprises a sleeve portion fitted with a segment of the transmission shaft and a shaft portion coupled to the top of the base, and the sleeve portion and the shaft portion are formed integrally. 
     
     
         16 . The disk rotating device as claimed in  claim 14 , further comprising:
 a twist block, coupled between the coupling and the base, wherein the coupling imposes a torque on the base via the twist block.   
     
     
         17 . The disk rotating device as claimed in  claim 14 , further comprising:
 a casing, fixed on one side of the gear box; and   a ball bearing, fixed within the casing and fitted with the coupling.