Probe card and method for testing magnetic sensor

Abstract

A probe card comprises a plurality of coils for impressing a magnetic field in changeable directions to a magnetic sensor and a group of probes for detecting an output signal of the magnetic sensor. A manufacturing cost of the magnetic sensor can be decreased.

1 . A probe card, comprising: 
 a plurality of coils for impressing a magnetic field in changeable directions to a magnetic sensor; and    a group of probes for detecting an output signal of the magnetic sensor, wherein said plurality of coils include two coils disposed to sandwich said group of probes, and to generate magnetic fields in opposite sense.    
   
   
       2 . The probe card according to  claim 1 , wherein the group of probes are demagnetized.  
   
   
       3 . The probe card according to  claim 1 , wherein the probe card encloses the magnetic sensor.  
   
   
       4 . The probe card according to  claim 1 , wherein said plurality of coils further include two other coils disposed to counter-face each other via said group of probes and to generate magnetic field in a same sense.  
   
   
       5 . A probe card, comprising: 
 a plurality of coils for impressing a magnetic field in changeable size to a magnetic sensor; and    a group of probes for detecting an output signal of the magnetic sensor.    
   
   
       6 . A method for testing a magnetic sensor module, comprising the steps of: 
 (a) contacting at least one magnetic sensor module formed on a wafer, the magnetic sensor module having a magnetic sensor and a digital signal processor, with a probe card having a coil for impressing a magnetic field on the magnetic sensor;    (b) testing the magnetic sensor by supplying current to the coil for impressing a magnetic field on the magnetic sensor and obtaining a response signal from the magnetic sensor module via the probe card, wherein the response signal is an angle signal processed by the digital signal processor; and    (c) separating the magnetic sensor module from the probe card.