Diaphragm pump and thin channel structure

Abstract

A diaphragm pump includes a duct structure capable of connecting an inlet port and an outlet port without using a tube. In the diaphragm pump, each of an inlet channel hole and an outlet channel hole is formed as a depression without the provision of inlet and outlet ports each formed as a protrusion on a housing, and a tubular protrusion provided on a plate forming a channel is fit in the depression.

1 . A diaphragm pump comprising:
 a vibrating diaphragm supported between a pair of housings, having a sealed edge to prevent leakage of liquid, and forming a pump chamber;   an inlet channel hole in which an inlet check valve is disposed and an outlet channel hole in which an outlet check valve is disposed, the inlet channel hole and the outlet channel hole being formed through at least a first housing of the pair of housings so as to communicate with the pump chamber;   an inlet channel having a first inlet channel plate and a second inlet channel plate laminated together with the first inlet channel plate, the first inlet channel plate including a tubular protrusion communicating with the inlet channel hole, the second inlet channel plate forming an inlet channel communicating with the tubular protrusion; and   an outlet channel having a first outlet channel plate and a second outlet channel plate laminated together with the first outlet channel plate, the first outlet channel plate including a tubular protrusion communicating with the outlet channel hole, the second outlet channel plate forming an outlet channel communicating with the tubular protrusion.   
   
   
       2 . The diaphragm pump according to  claim 1 , wherein the inlet channel hole and the outlet channel hole are substantially parallel to each other. 
   
   
       3 . The diaphragm pump according to  claim 1 , wherein the first inlet channel plate and the first outlet channel plate are made of a single plate material, and the second inlet channel plate and the second outlet channel plate are made of a single plate material. 
   
   
       4 . The diaphragm pump according to  claim 1 , wherein the first housing includes an annular groove used for receiving each of the tubular protrusions and being concentric with the each of the inlet channel hole and the outlet channel hole, and an O ring is disposed between an inner surface of the annular groove and an outer surface of the tubular protrusion fit in the annular groove. 
   
   
       5 . The diaphragm pump according to  claim 1 , wherein each of the tubular protrusions has a flange at an end thereof. 
   
   
       6 . The diaphragm pump according to  claim 1 , wherein each of the inlet channel and the outlet channel is non-circular in cross section, the inlet channel has a flat shape that has a greater width in a direction substantially perpendicular to a protruding direction of the tubular protrusion of the first inlet channel plate, and the outlet channel has a flat shape that has a greater width in a direction substantially perpendicular to a protruding direction of the tubular protrusion of the first outlet channel plate. 
   
   
       7 . The diaphragm pump according to  claim 1 , wherein the diaphragm is a piezoelectric vibrator in which a piezoelectric element is disposed on at least one of both sides of a shim made of a conductive metal sheet. 
   
   
       8 . A thin channel structure comprising:
 a channel block in which a channel hole is formed;   a first plate having a tubular protrusion communicating with the channel hole of the channel block; and   a second plate laminated together with the first plate and forming a liquid channel communicating with the tubular protrusion.