Method and device for non-destructive analysis of perforations in a material

Abstract

Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.

1 .- 55 . (canceled)  
     
     
         56 . A method of administering a drug, comprising: 
 (a) creating a porous polymer film by:    directing light onto a polymer film, the light having an intensity and a wavelength sufficient to form a plurality pores within the sheet;    forming a pore array within the sheet comprising a plurality of pores at locations where the light contacts a surface of the sheet, wherein the light passes through the plurality of pores;    detecting the light passing through the plurality of pores; and    analyzing the detected light to determine if the plurality of pores meet a pore size and pore shape criterion;    (b) moving formulation comprised of a drug and a carrier through the pores to create an aerosol; and    (c) inhaling the aerosol into lungs of a patient.    
     
     
         57 . The method of  claim 56 , further comprising: 
 modifying the method based on whether the pore size and pore shape criterion is met.    
     
     
         58 . The method of  claim 56 , wherein the light is a LASER.  
     
     
         59 . The method of  claim 56 , further comprising: 
 repeating the directing, forming, detecting, and analyzing for each of a plurality of sheets.    
     
     
         60 . The method of  claim 56 , wherein each of the plurality of pores formed has a diameter of less than about 100 microns.  
     
     
         61 . The method of  claim 58 , wherein the LASER is selected from the group consisting of a UV LASER and a visible light LASER.  
     
     
         62 . The method of  claim 56 , wherein the detecting comprises using a detector selected from the group consisting of a photodiode, a pyroelectric detector and a downconversion/photodiode, and wherein the analyzing comprises using a system comprising an electronic circuit.  
     
     
         63 . The method of  claim 57 , wherein the modifying comprises changing one or more of the intensity, the pulse duration, and the pulse frequency of the directed light.  
     
     
         64 . The method of  claim 63 , wherein the modifying comprises reducing the intensity wherein the fabrication method is essentially halted.  
     
     
         65 . The method of  claim 57 , wherein the modifying comprises moving a new sheet into the drilling position.  
     
     
         66 . The method of  claim 61 , wherein the UV LASER is selected from the group consisting of excimer LASERs, frequency multiplied YAG LASERs, frequency multiplied YLF LASERs.  
     
     
         67 . The method of  claim 58 , wherein the LASER is a pulsed Excimer LASER.  
     
     
         68 . A fabrication system for forming holes in pore arrays, comprising: 
 an energy source;    an energy transporter for directing the energy from the energy source to a sheet; and    a detector;    wherein the system is configured such that as the energy source drills through the sheet, light from the energy source impacts the detector.    
     
     
         69 . The system of  claim 68 , wherein the light is transmitted through one hole at a time, and the transmitted light is detected by the detector.  
     
     
         70 . The system of  claim 69 , wherein the detected light is used to determine a results selected from the group consisting of: 
 (a) if the hole has been made;    (b) if the hole has been made in sufficient size;    (c) if the hole has been made with the correct shape; and    (d) any combination of (a)-(c).    
     
     
         71 . The system of  claim 70 , wherein the system utilizes an output of the detector to determine whether the light detected has reached a threshold level of energy level.  
     
     
         72 . The system of  claim 71 , wherein the threshold level of energy is indicative of the size of the hole.  
     
     
         73 . The system of  claim 72 , further comprising: 
 a feedback mechanism which utilizes the output of the detector for controlling the amount or intensity of energy being delivered to the sheet.    
     
     
         74 . The system of  claim 73 , wherein the detection of a certain threshold level of light signals that the holes have reached the desired pore size thereby signaling that the energy source light should be discontinued.  
     
     
         75 . The system of  claim 69 , wherein the detector is selected from the group consisting of: 
 a CCD array;    a semi-conductor detector;    a bolometer;    a pyroelectric detector;    a thermoelectric detector; and    a down-conversion/photodiode detector.    
     
     
         76 . The system of  claim 74 , wherein the energy source is selected from the group consisting of: 
 an Nd:YAG Laser; and    an Nd:YLF Laser.    
     
     
         77 . The system of  claim 75 , wherein the energy source is a frequency multiplied Yittrium-Aluminum-Gainet (YAG) Laser, and the Laser light is provided in a series of discrete pulses.  
     
     
         78 . The system of  claim 76  wherein upon said signaling, the Laser pulses are discontinued, by an action selected from the group consisting of: 
 controlling the Laser;    an external shutter;    a galvo mirror; and    an acousto-optic.    
     
     
         79 . The system of  claim 78 , wherein the Laser is a solid state diode pumped Nd:YAG frequency tripled Laser emitting light at 355 nanometers.  
     
     
         80 . The system of  claim 79 , wherein said discrete pulses are from about 1 to about 100 nanoseconds duration.  
     
     
         81 . The system of  claim 74 , wherein the energy transporter comprises one or more of: 
 a beam-expander, 
 a final objective/projection lens;  
 a spatial filter;  
 a variable attenuator;  
 a beam splitter;  
 a galvo mirror; and  
 an acousto-optic.