Magnetic recording medium and method of manufacturing the same

Abstract

The present invention provides a method of manufacturing a magnetic recording medium having high recording density. The magnetic recording medium manufacturing method of the present invention is directed to a manufacturing method including: disposing at least a silicon layer on a substrate; disposing an uneven structure including regularly arranged projections on the silicon layer; disposing magnetic material on the upper surfaces of the projections and within recessed parts of the uneven structure; and allowing the magnetic material disposed within each recessed part to be changed into silicon compound by heat treatment.

1 . A magnetic recording medium including an uneven structure comprising regularly arranged projections disposed on a substrate; hard magnetic materials disposed on upper surfaces of the projections of the uneven structure; an underlying layer disposed within each of recessed parts of the uneven structure; and a non-magnetic material or a soft-magnetic material containing at least compound of the underlying layer disposed on the underlying layer. 
     
     
         2 . The magnetic recording medium according to  claim 1 ,
 wherein the underlying layer is silicon layer, germanium layer, aluminum layer or magnesium layer.   
     
     
         3 . The magnetic recording medium according to  claim 1 ,
 wherein a second underlying layer is at least further disposed on the substrate.   
     
     
         4 . A magnetic recording medium including: an underlying layer disposed on a substrate; an uneven structure comprising regularly arranged projections disposed on the underlying layer; hard magnetic materials disposed on upper surfaces of the projections of the uneven structure; a non-magnetic material or a soft-magnetic material containing at least compound of the underlying layer disposed within each of recessed parts of the uneven structure. 
     
     
         5 . The magnetic recording medium according to  claim 4 ,
 wherein the underlying layer is silicon layer, germanium layer, aluminum layer or magnesium layer.   
     
     
         6 . The magnetic recording medium according to  claim 4 ,
 wherein a second underlying layer is at least further disposed on the underlying layer.   
     
     
         7 . A method of manufacturing a magnetic recording medium, comprising the steps of:
 disposing, on a substrate, an uneven structure comprising regularly arranged projections;   disposing an underlying layer within each of recessed parts of the uneven structure;   disposing a magnetic material on each of the upper surfaces of the projections and within each of the recessed parts of the uneven structure; and   allowing the magnetic material disposed within each of the recessed parts to be changed into compound which contains the material of the underlying layer by heat treatment.   
     
     
         8 . The method of manufacturing magnetic recording medium according to  claim 7 ,
 wherein the disposing of the underlying layer comprises: disposing silicon layer, germanium layer, aluminum layer or magnesium layer.   
     
     
         9 . The method of manufacturing the magnetic recording medium according to  claim 7 ,
 wherein the disposing step of the uneven structure comprises the steps of:   disposing a second underlying layer on the substrate to further dispose an layer to be anodized on the second underlying layer;   allowing the layer to be anodized to be changed into porous film having regularly arranged holes by anodization;   growing oxide of the second underlying layer within holes of the porous film in a manner perpendicular to the substrate; and   removing the porous film to obtain an uneven structure by projections including oxides of the second underlying layer, which have been regularly arranged on the second underlying layer.   
     
     
         10 . The method of manufacturing magnetic recording medium according to  claim 9 ,
 wherein the growing of the oxide of the second underlying layer in a manner perpendicular to the substrate comprises: performing anodization of the second underlying layer.   
     
     
         11 . The method of manufacturing magnetic recording medium according to  claim 10 ,
 wherein an electrolytic solution used in implementing anodization to the second underlying layer is aqueous solution of ammonium borate, ammonium tartrate, or ammonium citrate.   
     
     
         12 . The method of manufacturing the magnetic recording medium according to  claim 7 ,
 which includes disposing an orientation layer and a magnetic material on each of the upper surfaces of the projections and within each of the recessed parts of the uneven structure.   
     
     
         13 . A method of manufacturing a magnetic recording medium, comprising the steps of:
 disposing at least an underlying layer on a substrate;   disposing an uneven structure comprising regularly arranged projections on the underlying layer;   disposing a magnetic material on each of the upper surfaces of the projections and within each of recessed parts of the uneven structure; and   allowing the magnetic material disposed within each of the recessed parts to be changed into compound which contains the material of the underlying layer by heat treatment.   
     
     
         14 . The method of manufacturing magnetic recording medium according to  claim 13 ,
 wherein the disposing of the underlying layer comprises disposing silicon layer, germanium layer, aluminum layer or magnesium layer.   
     
     
         15 . The method of manufacturing magnetic recording medium according to  claim 13 ,
 wherein the disposing step of the uneven structure comprises the steps of:   disposing at least an underlying layer on a substrate and further disposing a second underlying layer on the underlying layer to further dispose an layer to be anodized on the second underlying layer;   allowing the layer to be anodized to be changed into a porous film having regularly arranged holes by anodization;   growing the oxide of the second underlying layer within the holes of the porous film in a manner perpendicular to the substrate; and   removing the porous film to obtain an uneven structure by projections each including the oxide material of the second underlying layer, which have been regularly arranged on the second underlying layer.   
     
     
         16 . The method of manufacturing magnetic recording medium according to  claim 15 ,
 wherein the growing of the oxide of the second underlying layer in a manner perpendicular to the substrate comprises performing anodization of the second underlying layer.   
     
     
         17 . The method of manufacturing magnetic recording medium according to  claim 16 ,
 wherein an electrolytic solution used in performing anodization of the second underlying layer is an aqueous solution of ammonium borate, ammonium tartrate or ammonium citrate.   
     
     
         18 . The method of manufacturing the magnetic recording medium according to  claim 13 ,
 which includes disposing an orientation layer and a magnetic material on each of the upper surfaces of the projections and within each of the recessed parts of the uneven structure.