Method for manufacturing die and molding obtained therewith

Abstract

A substrate 11 is patterned by photolithography to make a first original plate. Next, the pattern 11 a of the first original plate is transferred to make a second original plate 12 . Next, the second original plate 12 is machined to make a die. Further, the pattern 12 b of the second original plate 12 is transferred to make a third original plate 13 , which is used as a die. This provides a method for manufacturing a die by which a special shape, for example, a shape having a high aspect ratio portion can be easily formed and a molding obtained therewith.

1 . A method for manufacturing a die, comprising the steps of: patterning a substrate by photolithography to make a first original plate; transferring the pattern of the first original plate to make a second original plate; and machining the second original plate to make a die.  
   
   
       2 . A method for manufacturing a die, comprising the steps of: forming a depression in a substrate to make a first original plate; transferring the pattern of the first original plate to make a second original plate having a protrusion corresponding to the depression; and machining the protrusion of the second original plate to make a die.  
   
   
       3 . The method for manufacturing a die according to  claim 1 , further comprising the step of transferring the pattern that the die has to make a third original plate, wherein the third original plate is used as a die or a mother die of a die.  
   
   
       4 . The method for manufacturing a die according to  claim 2 , further comprising the step of transferring the pattern that the die has to make a third original plate, wherein the third original plate is used as a die or a mother die of a die.  
   
   
       5 . A molding molded using a die, the die being obtained by the steps of: patterning a substrate by photolithography to make a first original plate; transferring the pattern of the first original plate to make a second original plate; and machining the second original plate to make a die.  
   
   
       6 . A molding molded using a die, the die being obtained by the steps of: forming a depression in a substrate to make a first original plate; transferring the pattern of the first original plate to make a second original plate having a protrusion corresponding to the depression; and machining the protrusion of the second original plate to make a die.  
   
   
       7 . The molding according to  claim 5 , including a relatively high aspect ratio portion.  
   
   
       8 . The molding according to  claim 6 , including a relatively high aspect ratio portion.  
   
   
       9 . The molding according to  claim 5 , including at least one selected from a group consisting of a microchannel, a microlens array, a lens, a Fresnel lens, a reflecting mirror, and a groove for an optical fiber.  
   
   
       10 . The molding according to  claim 6 , including at least one selected from a group consisting of a microchannel, a microlens array, a lens, a Fresnel lens, a reflecting mirror, and a groove for an optical fiber.