Method and system for detecting leak in electronic devices

Abstract

The methods and systems for testing electronic devices for leak detection are provided. In one method of detecting a leak in a sealed package, a sealed package is placed in a test gas environment, allowing the test gas to diffuse into an internal space of the sealed package through a leak formed in the sealed package. Thereafter, the sealed package is placed in an environment substantially free of the test gas and allowing the test gas to diffuse out of the internal space. The amount of the test gas in the test gas-free environment is detected. Based on the information obtained from the detection, it is determined whether the sealed package has one or more unintended leaks based on information obtained from the detecting.

1 . A method of detecting a leak in an electronic device, comprising: 
 providing an electronic device having an interior space, wherein the electronic device is substantially free of a test gas;    placing the electronic device in a substantially atmospheric pressure test gas environment comprising the test gas, whereby the test gas may diffuse into the interior space;    placing the electronic device in a substantially atmospheric pressure non-test gas environment substantially free of the test gas; and    detecting test gas that leaked from the electronic device or the interior space of the electronic device,    wherein the test gas environment and the non-test gas environment are created in a single chamber.    
     
     
         2 . The method of  claim 1 , wherein the test gas environment has a pressure that is non-destructive to the electronic device.  
     
     
         3 . The method of  claim 2 , wherein the non-destructive pressure is from about 0.1 atm to about 3.0 atm.  
     
     
         4 . The method of  claim 1 , wherein the non-test gas environment has a pressure that is non-destructive to the electronic device.  
     
     
         5 . The method of  claim 4 , wherein the non-destructive pressure is from about 0.1 atm to about 3.0 atm.  
     
     
         6 . The method of  claim 1 , wherein detecting leakage comprises measuring an amount of the test gas existing in the non-test gas environment.  
     
     
         7 . The method of  claim 1 , wherein detecting leakage comprises monitoring a relative amount of the test gas in the non-test gas environment over time.  
     
     
         8 . The method of  claim 1 , wherein detecting leakage comprises sensing existence of the test gas within the electronic device.  
     
     
         9 . The method of  claim 1 , wherein the volume of the chamber is in a range of about 10 to 1000 times the volume of the device.  
     
     
         10 . The method of  claim 1 , wherein the steps of  claim 1  are performed substantially simultaneously on multiple devices.  
     
     
         11 . The method of  claim 1 , wherein the size of a test gas molecule is similar to the size of a water molecule.  
     
     
         12 . The method of  claim 1 , wherein the detecting comprises continuously detecting during a period of time.  
     
     
         13 . The method of  claim 1 , wherein the detecting comprises periodic detection at selected intervals of time.  
     
     
         14 . The method of  claim 1 , further comprising calculating a leak rate based on a concentration of the test gas and a volume of the non-test gas environment.  
     
     
         15 . The method of  claim 1 , further comprising calculating a leak rate based on a concentration of the test gas and a volume of the electronic device.  
     
     
         16 . The method of  claim 8 , wherein sensing existence of the test gas within the electronic device comprises: 
 applying radiation of light to the electronic device; and    detecting a response of the test gas to the radiation.    
     
     
         17 . The method of  claim 16 , wherein the light is UV, and wherein the test gas emits visible light when exposed to the UV.  
     
     
         18 . The method of  claim 16 , wherein the light is a laser beam, and wherein the test gas absorbs the laser beam.  
     
     
         19 . The method of  claim 18 , wherein detecting a response comprises measuring reduction of intensity of the laser beam.  
     
     
         20 . The method of  claim 16 , wherein applying radiation of light to the electronic device comprises applying the radiation of light to a portion of the electronic device that is transparent to the light.  
     
     
         21 . The method of  claim 8 , wherein detecting leakage comprises measuring a relative amount of the test gas within the electronic device.  
     
     
         22 . The method of  claim 1 , further comprising determining whether the electronic device has a leak based on the detection.  
     
     
         23 . The method of  claim 1 , wherein the test gas environment is created by flowing the test gas through an area where the electronic device is placed.  
     
     
         24 . The method of  claim 1 , wherein the non-test gas environment is created in a closed chamber substantially free of the test gas.  
     
     
         25 . The method of  claim 1 , wherein the non-test gas environment is created by flowing a non-test gas through an area where the electronic device is placed.  
     
     
         26 . A method of detecting a leak in an electronic device, comprising: 
 providing an electronic device in a chamber, wherein the electronic device is substantially free of a test gas;    supplying the test gas to the chamber to create a substantially atmospheric pressure test gas environment within the chamber, wherein the test gas diffuses into the electronic device;    flushing the test gas out of the chamber;    supplying a non-test gas to the chamber to create a substantially atmospheric pressure non-test gas environment within the chamber; and    detecting test gas that leaked from the electronic device existing in the non-test gas environment,    wherein the test gas environment and the non-test gas environment are created in a single chamber.    
     
     
         27 . The method of  claim 26 , wherein the test gas comprises a noble gas.  
     
     
         28 . The method of  claim 26 , wherein the test gas is substantially non-reactive with a desiccant.  
     
     
         29 . The method of  claim 26 , wherein the electronic device is substantially hermetically sealed with regard to water vapor.  
     
     
         30 . The method of  claim 26 , wherein the electronic device is substantially permeably sealed with regard to water vapor.  
     
     
         31 . The method of  claim 26 , wherein the pressure of the flowing-in test gas is 1.0 atm to 1.5 atm.  
     
     
         32 . The method of  claim 26 , wherein the pressure of the flowing-in non-test gas is 1.0 atm to 1.5 atm.  
     
     
         33 . The method of  claim 26 , wherein the volume of the test gas environment is in a range of about 10 to 1000 times the volume of the device.  
     
     
         34 . The method of  claim 26 , wherein the volume of the non-test gas environment is in a range of about 10 to 1000 times the volume of the device.  
     
     
         35 . The method of  claim 26 , wherein detecting begins at or after flushing.  
     
     
         36 . The method of  claim 26 , wherein the detecting comprises continuously detecting during a period of time.  
     
     
         37 . The method of  claim 26 , wherein the detecting comprises periodic detection at selected intervals of time.  
     
     
         38 . The method of  claim 26 , wherein a leak rate is calculated using a concentration of the test gas and a volume of the chamber.  
     
     
         39 . The method of  claim 26 , wherein a leak rate is calculated using a concentration of the test gas and a volume of the electronic device.  
     
     
         40 . A system for testing an electronic device for leakage, comprising: 
 a test chamber;    a supply of a test gas coupled to the test chamber and configured to supply the test gas into the test chamber to create a substantially atmospheric pressure test gas environment within the test chamber;    a supply of a non-test gas coupled to the chamber and configured to supply the non-test gas into the test chamber to create a substantially atmospheric pressure non-test gas environment within the test chamber;    a test gas sensor coupled to the test chamber and configured to detect the test gas in the test chamber or flowing out of the test chamber; and    a controller coupled to the test gas sensor and configured to detect the test gas leaked by the electronic device.    
     
     
         41 . The system of  claim 40 , further comprising a processor configured to determine from information of the test gas detected by the sensor whether there is leak in an electronic device under test.  
     
     
         42 . The system of  claim 40 , further comprising a controller for controlling the supplies of the test gas and the non-test gas into the test chamber, and wherein the controller is configured to flush out of the test chamber a gaseous content therein.  
     
     
         43 . The system of  claim 40 , wherein the volume of the test chamber is in a range of about 10 to 1000 times the volume of the device.  
     
     
         44 . The system of  claim 40 , wherein the controller is configured to detect the test gas leaked by multiple electronic devices.  
     
     
         45 . The system of  claim 40 , wherein the size of a test gas molecule is similar to the size of a water molecule.  
     
     
         46 . The system of  claim 40 , wherein the controller is configured to continuously detect the test gas during a period of time.  
     
     
         47 . The system of  claim 40 , wherein the controller is configured to periodically detect the test gas at selected intervals of time.  
     
     
         48 . The system of  claim 40 , wherein a leak rate is calculated using the concentration of the test gas and the volume of the chamber.  
     
     
         49 . The system of  claim 40 , wherein a leak rate is calculated using the concentration of the test gas and the volume of the electronic device.  
     
     
         50 . A system for testing an electronic device for leakage, comprising: 
 means for providing a substantially atmospheric pressure test gas environment, which comprises a test gas;    means for creating a substantially atmospheric pressure non-test gas environment that is substantially free of the test gas; and    means for detecting test gas that leaked from the electronic device; and    means for controlling the means for detecting test gas that leaked from the electronic device when a device under test is in the non-test gas environment, wherein the controlling means comprises means for detecting the test gas leaked by the electronic device.