Detachably coupled image intensifier and image sensor

Abstract

A detachably coupled image intensifier and image sensor combination is disclosed along with systems and methods for using the detachably coupled image intensifier and image sensor combination. In one embodiment, there are at least two fiber optic plates aligned between the image intensifier and image sensor, and an oil or a gel is used to fill some or all of the gap(s) between pair(s) of adjacent fiber optic plates. In one embodiment, the detachably coupled image intensifier and image sensor combination is used for sample inspection.

1 . An apparatus for inspection of a sample, comprising: 
 a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample;    at least one image intensifier, each of which is detachably coupled to an image sensor, so as to receive the radiation from the area over a certain angular range, and to provide intensified radiation to the image sensor; and    at least one image sensor, each of which is configured to receive radiation from at least one image intensifier, so as to form at least one respective image of the area.    
   
   
       2 . The apparatus of  claim 1 , further comprising: an image processor, which is adapted to process at least one of the respective images so as to detect a defect on the surface.  
   
   
       3 . The apparatus of  claim 1 , further comprising at least two fiber optic plates for each image intensifier, wherein said image intensifier is further detachably coupled to one of the image sensors using said at least two fiber optic plates, and wherein non-binding filling fills at least one gap which is between at least one pair of adjacent fiber optic plates among said at least two fiber optic plates.  
   
   
       4 . The apparatus of  claim 3 , wherein said non-binding filling is an oil or gel with an index of refraction that is closer to an index of refraction of said fiber optic plates than an index of refraction of air is to said index of refraction of said fiber optic plates.  
   
   
       5 . The apparatus of  claim 3 , further comprising: a detachable attaching medium detachably coupling each said image intensifier to one of the image sensors, wherein said medium includes an elastic material configured to at least allow said at least one pair of adjacent fiber optic plates to be pushed close together without substantially damaging any of said image intensifier tube, image sensor, and said fiber optic plates.  
   
   
       6 . The apparatus of  claim 1 , further comprising: a detachable attaching medium detachably coupling each said image intensifier to one of the image sensors.  
   
   
       7 . The apparatus of  claim 6 , wherein said detachable attaching medium includes at least one screw configured when screwed in to prevent separation of each said image intensifier tube from said one image sensor.  
   
   
       8 . The apparatus of  claim 1 , wherein at least one of said image intensifiers is magnetically coupled.  
   
   
       9 . A method of inspecting a sample, comprising: 
 a. providing at least one image intensifier tube detachably coupled to an image sensor with non-binding filling;    b. directing optical radiation onto an area of a surface of a sample to be inspected;    c. receiving and intensifying the radiation scattered from the area using said at least one provided detachably coupled image intensifier tube and image sensor, so as to form a respective images of the area, each of said provided detachably coupled image intensifier tube and image sensor being configured to receive the radiation that is scattered to into a different, respective angular range; and    d. processing at least one of the respective images so as to detect a defect on the surface.    
   
   
       10 . The method of  claim 9 , wherein said non-binding filling fills at least one gap which is between at least one pair of adjacent fiber optic plates among at least two fiber optic plates aligned between said image intensifier tube and said image sensor.  
   
   
       11 . A method of inspecting a sample comprising: 
 a. providing an image intensifier tube detachably coupled to an image sensor;    b. separating said image intensifier tube from said image sensor;    c. coupling at least one of said separated image intensifier tube and image sensor in a combination of image intensifier tube and image sensor;    d. directing optical radiation onto an area of a surface of a sample to be inspected;    e. receiving the radiation scattered from the area using said combination coupled in (c) so as to form a respective image of the area; and    f. processing said image so as to detect a defect on the surface.    
   
   
       12 . The method of  claim 11 , wherein said coupling in (c) includes detachably coupling the same or different image intensifier tube to said separated image sensor using at least two fiber optic plates and a non-binding filling which fills at least one gap which is between at least one pair of adjacent fiber optic plates among said at least two fiber optic plates.