Fe-Co based target material and method for producing the same

Abstract

There is disclosed a method for producing a Fe—Co based target material for forming a soft magnetic thin-film. This method comprises the steps of: preparing a first raw-material powder having an Fe:Co weight ratio ranging from 8:2 to 7:3 and a second raw-material powder having an Fe—Co weight ratio ranging from 2:8 to 0:10; mixing the first raw-material powder and the second raw-material powder together to obtain a powder mixture having an Fe:Co weight ratio ranging from 8:2 to 2:8; and applying a pressure of not less than 100 MPa to the powder mixture at a temperature ranging from 1073 to 1473 K for consolidation. At least one additional element selected from the group consisting of Nb, Zr, Ta and Hf is added to either one or both of the first and second raw-material powders in a total amount of 3 to 15 atom % with respect to the total amount of the powder mixture. The Fe—Co based target material thus produced has a high density, while having a magnetic permeability lower than the conventional one.

1 . A method for producing a Fe—Co based target material, comprising the steps of: 
 preparing a first raw-material powder having an Fe:Co weight ratio ranging from 8:2 to 7:3 and a second raw-material powder having an Fe—Co weight ratio ranging from 2:8 to 0:10;    mixing the first raw-material powder and the second raw-material powder together to obtain a powder mixture having an Fe:Co weight ratio ranging from 8:2 to 2:8; and    applying a pressure of not less than 100 MPa to the powder mixture at a temperature ranging from 1073 to 1473 K for consolidation,    wherein at least one additional element selected from the group consisting of Nb, Zr, Ta and Hf is added to either one or both of the first and second raw-material powders in a total amount of 3 to 15 atom % with respect to the total amount of the powder mixture.    
   
   
       2 . The method according to  claim 1 , wherein, prior to the mixing step, the additional element is added to the first raw-material powder in a total amount of not less than 1 atom % with respect to the total amount of the first raw-material powder.  
   
   
       3 . The method according to  claim 1  or  2 , wherein, prior to the mixing step, the additional element is added to the second raw-material powder in a total amount of not less than 1 atom % with respect to the total amount of the second raw-material powder.  
   
   
       4 . An Fe—Co based target material, which is obtainable by the method according to  claim 1 , wherein the Fe—Co based target material is made of an Fe—Co based alloy comprising: 
 85 to 97 atom % of Fe and Co, which have a Fe:Co weight ratio ranging from 8:2 to 2:8; and    3 to 15 atom % of at least one additional element selected from the group consisting of Zr, Nb, Ta and Hf.    
   
   
       5 . The Fe—Co based target material according to  claim 4 , having magnetic permeability ranging from 10 to 200.