Metal photomask box

Abstract

The present invention relates to a metal photomask box structure, which is composed of an upper cover member, a lower cover member, and a ring-shaped airtight washer positioned between the upper metal cover member and the lower metal cover member. At least a movable connecting mechanism is disposed on one side of the metal photomask box to connect the upper metal cover member and the lower metal cover member. And at least a latch piece is disposed on an opposite side of the movable connecting mechanism to latch the upper metal cover member and the lower metal cover member.

1 . A metal photomask box, comprising:
 a metal upper cover member;   a metal lower cover member;   at least a movable connecting mechanism disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member; and   at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member.   
   
   
       2 . The metal photomask box according to  claim 1 , wherein said metal photomask box is made of stainless steel series or aluminum alloy or magnesium alloy. 
   
   
       3 . The metal photomask box according to  claim 1 , further comprising a ring-shaped airtight washer which is disposed between said metal upper cover member and said metal lower cover member. 
   
   
       4 . The metal photomask box according to  claim 3 , wherein the material of said ring-shaped airtight washer is a polymer resin. 
   
   
       5 . The metal photomask box according to  claim 3 , wherein the material of said ring-shaped airtight washer is a conductive adhesive film. 
   
   
       6 . A metal photomask box, comprising:
 a metal upper cover member;   a metal lower cover member;   at least a movable connecting mechanism disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member;   at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member;   a ring-shaped airtight washer disposed between said metal upper cover member and said metal lower cover member; and   a plurality of air valve devices disposed on said metal upper cover member or said metal lower cover member.   
   
   
       7 . The metal photomask box according to  claim 6 , wherein said metal photomask box is made of stainless steel series or aluminum alloy or magnesium alloy. 
   
   
       8 . The metal photomask box according to  claim 6 , wherein the material of said ring-shaped airtight washer is a polymer resin. 
   
   
       9 . The metal photomask box according to  claim 6 , wherein said air valve device comprises at least an air filling valve devices and at least an air exhausting valve devices. 
   
   
       10 . The metal photomask box according to  claim 6 , wherein said air filing valve devices and said air exhausting valve devices further comprisies a flexible baffle plate for air filling valve and a flexible baffle plate for air exhausting valve, respectively. 
   
   
       11 . The metal photomask box according to  claim 6 , wherein a longer side can be formed on said plurality of valve devices and the distance of said longer side is 170 mm. 
   
   
       12 . The metal photomask box according to  claim 6 , wherein a shorter side can be formed on said plurality of valve devices and the distance of said shorter side is 110 mm. 
   
   
       13 . The metal photomask box according to  claim 6 , further comprising a vibration detecting device which is disposed on said metal upper cover member or said metal lower cover member. 
   
   
       14 . The metal photomask box according to  claim 6 , further comprising a RFID which is disposed on any side of said metal upper cover member or said metal lower cover member. 
   
   
       15 . The metal photomask box according to  claim 6 , further comprising a plurality of pressing buckles which are disposed on each corner of said metal upper cover member and said metal lower cover member. 
   
   
       16 . The metal photomask box according to  claim 15 , wherein said pressing buckles comprises:
 a base body fixedly connected to each corner of said upper cover member of said photomask box through a plurality of supporting points;   a flexible bending member, for one bent pole of the member connected to said base body and the other bent pole positioned between said one or plurality of supporting points in flexible floating state, further comprising a top supporting surface and a pressing buckling surface;   wherein said top supporting surface and said pressing buckling surface of said flexible bending member contact and lock said photomask, when said photomask box covers a photomask.   
   
   
       17 . A metal photomask box, comprising:
 a metal upper cover member;   a metal lower cover member;   at least a movable connecting mechanism being disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member;   at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member;   a ring-shaped airtight washer, disposed between said metal upper cover member and said metal lower cover member; and   a plurality of air valve devices being disposed on one side of said metal upper cover member or one side of said metal lower cover member.   
   
   
       18 . The metal photomask box according to  claim 17 , further comprising a vibration detecting device which is disposed on said metal upper cover member or said metal lower cover member. 
   
   
       19 . The metal photomask box according to  claim 17 , further comprising a RFID which is disposed on any side of said metal upper cover member or said metal lower cover member. 
   
   
       20 . The metal photomask box according to  claim 17 , further comprising a plurality of pressing buckles which are disposed on each corner of said metal upper cover member and said metal lower cover member.