Gas filling facility for photomask pod or the like

Abstract

A gas filling system includes a work platform installed in a pod storage cabinet and defining an accommodation chamber for holding a photomask pod, a pod detaching mechanism disposed in one side of the work platform and controllable to unlock the locking members of the photomask pod for allowing removal of a cover member of the photomask pod from its support tray, and a displacement mechanism mounted in a second side of the work platform and controllable to separate the support tray and the cover member of the photomask pod for allowing filling of an inert gas into the accommodation chamber.

1 . A gas filling system for filling a pod with a gas, said pod comprising a support tray, a cover member detachably covering said support tray, and locking members for locking said cover member to said support tray, said support tray having support members for holding a storage item in position, said locking members each having at least one retaining hole, the gas filling system comprising:
 a work platform, said work platform comprising an accommodation chamber, a first opening at a one side of said accommodation chamber, a second opening at another side of said accommodation chamber, and at least one filling port through which a gas is filled into said accommodation chamber;   a pod detaching mechanism disposed in one side of said work platform, said pod detaching mechanism comprising a power drive, and a plurality of movable blocks movable by said power drive to lock/unlock said locking members of said pod, said movable blocks each having at least one retaining rod for engaging said retaining holes of said locking members; and   a displacement mechanism mounted at the second opening of said work platform, said displacement mechanism comprising at least one vertical motion rod, a carrier plate fixedly fastened to said at least one vertical motion rod for holding said pod in said accommodation chamber, at least one suction mount provided at said carrier plate for securing said pod, and transmission means controllable to move said at least one vertical motion rod and said carrier plate.   
   
   
       2 . The gas filling system as claimed in  claim 1 , where in the gas to be filled in said accommodation chamber is prepared from one of an inert gas, dry air, pure air and nitrogen. 
   
   
       3 . The gas filling system as claimed in  claim 1 , wherein said power drive of said pod detaching mechanism is prepared from one of a motor drive, a gear transmission mechanism, a belt transmission mechanism, a linear slide and track assembly, a pneumatic cylinder, a hydraulic cylinder and their combination. 
   
   
       4 . The gas filling system as claimed in  claim 1 , wherein the transmission means of said displacement mechanism is prepared from one of a motor drive, a gear transmission mechanism, a belt transmission mechanism, a linear slide and track assembly, a pneumatic cylinder, a hydraulic cylinder and their combination. 
   
   
       5 . The gas filling system as claimed in  claim 1 , wherein the cover member of said pod is sealed to the first opening of said accommodation chamber of said work platform. 
   
   
       6 . The gas filling system as claimed in  claim 1 , wherein the accommodation chamber of said work platform is peripherally sealed with an airtight seal member. 
   
   
       7 . A pod detaching mechanism installed in one side of a work platform of a gas filling system adapted for filling a pod with a gas, said pod comprising a support tray, a cover member detachably covering said support tray, and locking members for locking said cover member to said support tray, said locking members each having at least one retaining hole, the pod detaching mechanism comprising a power drive, and a plurality of movable blocks and movable by said power drive to lock/unlock said locking members of said pod, said movable blocks each having at least one retaining rod for engaging the retaining holes of said locking members. 
   
   
       8 . The pod detaching mechanism as claimed in  claim 7 , wherein said power drive is prepared from one of a motor drive, a gear transmission mechanism, a belt transmission mechanism, a linear slide and track assembly, a pneumatic cylinder, a hydraulic cylinder and their combination. 
   
   
       9 . A displacement mechanism installed in a work platform of a gas filling system adapted for moving a pod, said pod comprising a support tray, a cover member detachably covering said support tray, and locking members for locking said cover member to said support tray, said locking members each having at least one retaining hole, the displacement mechanism comprising at least one vertical motion rod, a carrier plate fixedly fastened to said at least one vertical motion rod for holding said pod in said accommodation chamber, at least one suction mount provided at said carrier plate for securing said pod, and transmission means controllable to move said at least one vertical motion rod and said carrier plate. 
   
   
       10 . The displacement mechanism as claimed in  claim 9 , wherein said transmission means is prepared from one of a motor drive, a gear transmission mechanism, a belt transmission mechanism, a linear slide and track assembly, a pneumatic cylinder, a hydraulic cylinder and their combination. 
   
   
       11 . A gas filling system for filling a pod with a gas, said pod comprising a support tray, a cover member detachably covering said support tray, and locking members for locking said cover member to said support tray, the gas filling system comprising:
 a work platform, said work platform comprising an accommodation chamber for accommodating said pod and for filling of a gas in the pod stored therein;   a pod detaching mechanism disposed in one side of said work platform, said pod detaching mechanism comprising a power drive, and actuating means movable by said power drive to lock/unlock said locking members of said pod; and   a displacement mechanism mounted in a second side of said work platform and controllable to move said support tray of said pod relative to said cover member of said pod after unlocking of said locking members of said pod.   
   
   
       12 . A gas filling system for filling a pod with a gas, said pod comprising a support tray, a cover member detachably covering said support tray, and locking members for locking said cover member to said support tray, said support tray having support members for holding a storage item in position, said locking members each having at least one retaining hole, the gas filling system comprising:
 a pod storage cabinet, said pod storage cabinet comprising a storage;   a work platform installed in said pod storage cabinet in a bottom side of said storage, said work platform comprising an accommodation chamber for accommodating said pod and for filling of a gas in the pod stored therein;   a pod detaching mechanism disposed in one side of said work platform inside said pod storage cabinet, said pod detaching mechanism comprising a power drive, and actuating means movable by said power drive to lock/unlock said locking members of said pod; and   a displacement mechanism mounted in a second side of said work platform inside said pod storage cabinet and controllable to move said support tray of said pod relative to said cover member of said pod after unlocking of said locking members of said pod.   
   
   
       13 . The gas filling system as claimed in  claim 12 , wherein said access door of said pod storage cabinet are peripherally sealed with airtight seal means. 
   
   
       14 . The gas filling system as claimed in  claim 12 , wherein said pod storage cabinet comprises an access door controllable to close/open said storage. 
   
   
       15 . The gas filling system as claimed in  claim 14 , wherein said storage of said pod storage cabinet are peripherally sealed with airtight seal means.