Device modeling for proximity effects

Abstract

A method for calibrating a software model for a given structure of interest for a variable imposed by an adjacent structure. First determine the spatial extent of the variable imposed by the adjacent structure. Then assign a value to the spatial extent, which varies as a function of distance from the adjacent structure to the given structure. Finally, attach that value to the model of the given structure.

1 - 14 . (canceled)  
   
   
       15 . A method for creating a software model for simulating the operation of a device in an integrated circuit, the method comprising the steps of: 
 creating a compact model for representing the operation of the device in a design;    measuring a change in a performance parameter of the device in an integrated circuit that results from the physical distance of the device to a structure extrinsic to the device;    determining how the performance parameter of the device is changed in response to altering the physical distance with the structure;    modifying the compact model to represent the determined performance parameter of the device relative to the physical distance to the structure; and    outputting the compact model for utilization in creating an integrated circuit design.    
   
   
       16 . The method of  claim 15  wherein the step of creating a compact model includes the step of: 
 creating a compact model for representing the operation of the device in a design on a first manufacturing process.    
   
   
       17 . The method of  claim 16  wherein the step of measuring a change in the performance of the device includes the steps of: 
 manufacturing an integrated circuit including the device in a second manufacturing process.    
   
   
       18 . An apparatus for creating a software model for simulating the operation of a device in an integrated circuit, the apparatus comprising: 
 means for creating a compact model for representing the operation of the device in a design;    means for measuring a change in a performance parameter of the device in an integrated circuit that results from the physical distance of the device to a structure extrinsic to the device;    means for determining how the performance parameter of the device is changed in response to altering the physical distance with the structure;    means for modifying the compact model to represent the determined performance parameter of the device relative to the physical distance to the structure; and    outputting the compact model for utilization in creating an integrated circuit design.    
   
   
       19 . The apparatus of  claim 19  wherein the means for creating a compact model includes: 
 means for creating a compact model for representing the operation of the device in a design on a first manufacturing process.    
   
   
       20 . The apparatus of  claim 20  wherein the means for measuring a change in the performance of the device includes: 
 means for manufacturing an integrated circuit including the device in a second manufacturing process.