Thin film magnetic recording media

Abstract

A method and apparatus for forming a thin film magnetic recording media, the method comprises generating magnetic nanoclusters from a target of magnetic material, crystallizing the magnetic nanoclusters, and depositing the magnetic nanoclusters onto a substrate to form a thin film of magnetic particles thereon. The magnetic nanoclusters are deposited onto the substrate after crystallized and therefore after the deposition. The apparatus comprises a first chamber, a second chamber connected to the first chamber, and a third chamber connected to the second chamber. The first chamber has a source for generating magnetic nanoclusters. The second chamber is to receive the magnetic nanoclusters and crystallize the magnetic nanoclusters. The third chamber is to receive the crystallized magnetic nanoclusters from the second chamber and deposit the crystallized magnetic nanoclusters onto the substrate positioned therein.

1 - 17 . (canceled)  
   
   
       18 . An apparatus for forming a thin film magnetic recording medium onto a substrate, the apparatus comprising: a first chamber having a source for generating magnetic nanoclusters; a second chamber connected to the first chamber for receiving and crystallizing the magnetic nanoclusters, a third chamber connected to the second chamber for receiving the crystallized magnetic nanoclusters and depositing the crystallized magnetic nanoclusters onto the substrate positioned therein, wherein the magnetic nanoclusters are deposited on the substrate after crystallized.  
   
   
       19 . The apparatus as recited in  claim 18 , further comprising a first supplier for providing a first non-magnetic material to encapsulate the magnetic nanoclusters.  
   
   
       20 . The apparatus as recited in  claim 19 , wherein the first non-magnetic material comprises a surfactant.  
   
   
       21 . The apparatus as recited in  claim 20 , wherein the surfactant comprises at least one of a group consisting of fatty acids, alkyl thiols, alkyl diulfides, alkyl nitrites and alkyl isonitiles.  
   
   
       22 . The apparatus as recited in  claim 18 , further comprising a rotatable stage for holding the substrate in the third chamber.  
   
   
       23 . The apparatus as recited in  claim 18 , further comprising a second supplier for depositing a second non-magnetic material onto the substrate upon deposition of the magnetic nanocrystals.  
   
   
       24 . The apparatus as recited in  claim 23 , wherein the second non-magnetic material comprises at least one of a group consisting of C, SiO 2 , Si 3 N 4 , BN and carbon hydrogenate polymer.  
   
   
       25 . The apparatus as recited in claim  48 , wherein the magnetic material comprises at least one of a group consisting of Co, Fe, Ni, Sm, Pt, Cr, Ta, Nd, Pd, Gd, B, N, C, P, Ti, W, Mo, Ag, Ru, Au, Nb, Pb, Dy.  
   
   
       26 . The apparatus as recited in  claim 25 , further comprising at least one of a group consisting of a binary alloy and a ternary alloy of the magnetic material.  
   
   
       27 . A thin film magnetic recording medium comprising: a substrate; a magnetic thin film layer disposed on the substrate, wherein the magnetic thin film layer has magnetic particles isolated by a non-magnetic content, wherein the magnetic particles are formed on the substrate after crystallization.  
   
   
       28 . The thin film magnetic recording medium as recited in  claim 27 , wherein each of the magnetic particles has a magnetic easy axis that is anisotropically orientated.  
   
   
       29 . The thin film magnetic recording medium as recited in  claim 27 , wherein the magnetic particles having a dimension of less than about 8 nm.  
   
   
       30 . The thin film magnetic recording medium as recited in  claim 29 , wherein the magnetic particles having a distribution width of less than about 10%.  
   
   
       31 . The thin film magnetic recording medium as recited in  claim 27 , wherein the non-magnetic content comprises at least one of a group consisting of fatty acids, alkyl thiols, alkyl diulfides, alkyl nitrites and alkyl isonitiles.  
   
   
       32 . The thin film magnetic recording medium as recited in  claim 27 , wherein the non-magnetic content comprises at least one of C, SiO 2 , Si 3 N 4 , BN and carbon hydrogenate polymer.  
   
   
       33 . The thin film magnetic recording medium as recited in  claim 27 , further comprising a protective overcoating disposed on the magnetic thin film layer.