Peripheral inspection system and method

Abstract

A method of inspecting two or more sides of an object is provided. The method includes generating one set of image data of two or more sides of the object, such as by using spherical mirror segments that project all sides of the object onto a single image and generating an X by Y array of image data of the single image. The projection of the image data is then compensated for, such as by identifying inspection processes to locate defects of the object in the projected image data or by converting the image data from the projected inspection coordinates to Cartesian coordinates. Predetermined inspection processes are then performed on the compensated image data, such as by using the inspection processes that are optimised for use with the projected image data or by converting the projected image data into a Cartesian format and using Cartesian image data inspection processes.

1 . A method of inspecting two or more sides of an object comprising:
 generating one set of image data of two or more sides of the object;   compensating for projection of the image data; and   performing predetermined inspection processes on the compensated image data.   
     
     
         2 . The method of  claim 1  wherein generating one set of image data of two or more sides of the object comprises:
 placing the object under a first spherical segment mirror; and   receiving image data from the first spherical segment mirror a circumferential spherical segment mirror that encircles the object.   
     
     
         3 . The method of  claim 1  wherein compensating for projection of the image data comprises converting the image data from an inspection coordinate format into a Cartesian coordinate format. 
     
     
         4 . The method of  claim 1  wherein performing predetermined inspection processes on the compensated image data comprises using inspection processes that are optimised for data generated in the inspection coordinate format. 
     
     
         5 . A system for inspecting two or more sides of an object comprising:
 two or more mirrors and one or more lenses generating an image of the two or more sides of the object;   an image data generation system generating image data of the image of the two or more sides of the object; and   a projected image data inspection system compensating for projection of the image of the two or more sides of the object and analysing the compensated image data to determine whether the object contains defects.   
     
     
         6 . The system of  claim 5  wherein the two or more mirrors comprise:
 a first spherical mirror segment located between the object and the image data generation system; and   
       one or more lenses located between a second spherical mirror and the image data generation system. 
     
     
         7 . The system of  claim 5  wherein the two or more mirrors comprise:
 a conical mirror segment located between the object and the lens; and   a spherical mirror segment encircling the conical mirror segment and the object.   
     
     
         8 . The system of  claim 5  wherein the projected image data inspection system comprises a polar inspection system receiving projected polar image data of the object and performing one or more inspection processes on the projected polar image data. 
     
     
         9 . The system of  claim 5  wherein the projected image data inspection system comprises a Cartesian mapping and inspection system receiving projected polar image data of the object, converting the projected polar image data into Cartesian coordinate data, and performing one or more inspection processes on the Cartesian coordinate data. 
     
     
         10 . The system of  claim 5  wherein the projected image data inspection system comprises a peripheral location system receiving projected polar image data of the object and identifying a predetermined feature on the periphery of the object. 
     
     
         11 . The system of  claim 5  wherein the two or more mirrors comprise:
 a first mirror segment located between the object and the image data generation system;   a second mirror segment encircling the first mirror segment and the object; and   a lens located between the object and the image data generation system.   
     
     
         12 . The system of  claim 6  wherein the first spherical mirror segment has a hole through which the object is inspected. 
     
     
         13 . The system of  claim 7  wherein the conical mirror segment has a hole through which the object is inspected.