Substrate transporting mechanism, substrate transporting method and substrate processing system

Abstract

The present invention provides a substrate transporting mechanism and a substrate transporting method, in which driving force can be separated or combined together without using a mechanical synchronizing mechanism such as gear. A substrate transporting mechanism in a chamber 31 comprises a fixed stage 310 and a movable stage 320 . On the movable stage 320 , a first, a second, and a third driven magnets 331, 332 , and 333 are supported by bearing units 322 . These driven magnets are magnetically coupled with each other, and the third driven magnet 333 is magnetically coupled with the roller magnet 323 . Further, the first driven magnet 331 is magnetically coupled with the driving magnet 330 , and the driving force from the driving magnet 330 can be separated or combined.

1 . A substrate transport mechanism arranged in a chamber and provided with a fixed stage where a substrate is placed and with a movable stage where the substrate is transported, wherein:
 there are provided a plurality of transport rollers for transporting the substrates, roller magnets mounted on the transport rollers, and driven magnets magnetically coupled with the roller magnets on the movable stage;   when the movable stage is moved up to upper position, the driven magnet is magnetically coupled with driving magnet arranged outside of said chamber and is driven, and said substrate is separated from said fixed stage and is supported by said transport roller; and   when the movable stage is moved down to lower position, said driven magnets and the driving magnets are magnetically separated from each other, and said substrates are placed on said fixed stage.   
   
   
       2 . A substrate transporting mechanism according to  claim 1 , wherein said driven magnets comprise a plurality of magnets sequentially and magnetically coupled with each other, and one of said plurality of magnets is magnetically coupled with said roller magnet and rotates the transport rollers. 
   
   
       3 . A substrate transporting mechanism according to  claim 1 , wherein said driving magnet is arranged in a hollow partition wall prepared by turning a part of partition wall of said chamber in inward direction and formed in convex shape. 
   
   
       4 . A substrate transporting mechanism according to  claim 3 , wherein said hollow partition wall has a partition unit with a cross-section in approximately semi-circular form, and driving force from the driving magnet is transmitted to the driven magnet via the partition unit. 
   
   
       5 . A substrate transporting mechanism according to  claim 1 , wherein the pressure in internal space of said chamber can be reduced to a predetermined pressure. 
   
   
       6 . A substrate transporting method using a substrate transporting mechanism according to one of  claims 1  to  5 , wherein said method comprises the steps of:
 carrying in said substrate to said movable stage or carrying out the substrate from the movable stage along a first axial direction by rotation of said transport roller when the movable stage is at upper position; and   carrying in said substrate to said fixed stage along a second axial direction almost perpendicularly crossing said first axial direction and carrying out the substrate from the fixed stage when the movable stage is at lower position.   
   
   
       7 . A substrate processing system, comprising a load-lock chamber able to communicate with an atmospheric side via a first gate valve, a process chamber for performing a predetermined processing to the substrate in the chamber, and a transfer chamber, said transfer chamber being able to communicate with said load-lock chamber via a second gate valve, and able to communicate with said process chamber via a third gate valve and having transport arms for carrying in and out the substrate to or from said load-lock chamber and said process chamber inside said transfer chamber; and
 said load-lock chamber has the substrate transporting mechanism according to  claim 5  inside said chamber.