Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus

Abstract

A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information. Thus, information for controlling the operation of the substrate processing apparatus can be efficiently backed up without burdening the user.

1 . A substrate processing apparatus management system connecting a substrate processing apparatus and a support computer with each other through a network, wherein 
 said support computer comprises:    a-1) a first storage element storing basic information necessary in initialization of said substrate processing apparatus, and    a-2) a basic information transmission element transmitting said basic information to said substrate processing apparatus through said network, said substrate processing apparatus comprises:    b-1) a second storage element storing said basic information received from said support computer, and    the initial state of said substrate processing apparatus is set up with said basic information stored in said second storage element.    
   
   
       2 . The substrate processing apparatus management system according to  claim 1 , wherein 
 said basic information is information set in common as to the same type of substrate processing apparatuses.    
   
   
       3 . The substrate processing apparatus management system according to  claim 2 , wherein 
 said basic information is information varying with the version of a control program for controlling said substrate processing apparatus,    said substrate processing apparatus further comprises:    b-2) a posting element posting the version of said control program installed in said substrate processing apparatus to said support computer, and    said basic information transmission element includes:    a-2-1) an element transmitting said basic information corresponding to the version of said control program posted from said substrate processing apparatus to said substrate processing apparatus.    
   
   
       4 . The substrate processing apparatus management system according to  claim 3 , wherein 
 said substrate processing apparatus further comprises:    b-3) an element instructing a transmission request for said basic information to said support computer.    
   
   
       5 . The substrate processing apparatus management system according to  claim 4 , wherein 
 said support computer further comprises:    a-3) an element instructing transmission of said basic information to said substrate processing apparatus.    
   
   
       6 . A substrate processing apparatus controlled with basic information stored in a storage element as initialization information, comprising: 
 a) a receiving element receiving said basic information from a computer connected with said substrate processing apparatus through a network; and    b) a storing element storing received said basic information in said storage element.    
   
   
       7 . The substrate processing apparatus according to  claim 6 , wherein 
 said basic information is information set in common as to the same type of substrate processing apparatuses.    
   
   
       8 . The substrate processing apparatus according to  claim 7 , wherein 
 said basic information is information varying with the version of a control program for controlling said substrate processing apparatus,    said substrate processing apparatus further comprising:    c) a posting element posting the version of said control program installed in said substrate processing apparatus to said computer.    
   
   
       9 . The substrate processing apparatus according to  claim 8 , further comprising: 
 d) an element instructing a transmission request for said basic information to said computer.    
   
   
       10 . A substrate processing apparatus management method managing a substrate processing apparatus whose operation is controlled with basic information stored in a storage element as initialization information, comprising steps of: 
 a) receiving said basic information from a computer connected with said substrate processing apparatus through a network; and    b) storing received said basic information in said storage element.    
   
   
       11 . A program for a computer included in a substrate processing apparatus, said substrate processing apparatus being controlled with basic information stored in a storage element as initialization information, wherein 
 execution of said program by said computer enables said substrate processing to execute    a) receiving said basic information from an outer computer connected with said substrate processing apparatus through a network; and    b) storing received said basic information in said storage element.    
   
   
       12 . A computer-readable recording medium on which a program for a computer included in a substrate processing apparatus is recorded, said substrate processing apparatus being controlled with basic information stored in a storage element as initialization information, wherein 
 execution of said program by said computer enables said substrate processing to execute    a) receiving said basic information from an outer computer connected with said substrate processing apparatus through a network; and    b) storing received said basic information in said storage element.