Method for packaging contamination vulnerable articles and package therefore

Abstract

A package for the transportation of contamination vulnerable articles is provided, comprising a closeable plastic container which is loaded with the respective articles, a first bag made from plastic surrounding said container, and a second bag made from plastic wrapping said first bag, wherein said first bag is provided with a valve-filter arrangement in order to allow a controlled air stream into said first bag when opening said valve-filter arrangement.

1 . A package for the transportation of contamination vulnerable articles, comprising a closeable plastic container which is loaded with the respective articles, a first bag ( 4 ) made from plastic surrounding said container, and a second bag made from plastic wrapping said first bag ( 4 ), wherein said first bag ( 4 ) is provided with a valve-filter arrangement ( 6 ,  16 ) in order to allow a controlled air stream into said first bag ( 4 ) when opening said valve-filter arrangement ( 6 ,  16 ). 
   
   
       2 . The package according to  claim 1 , wherein said contamination vulnerable articles are semiconductor wafers. 
   
   
       3 . The package according to  claim 1 , wherein said valve-filter arrangement ( 6 ,  16 ) is mounted into a corner portion ( 2 ) of said bag ( 4 ). 
   
   
       4 . The package according to  claim 3 , wherein said mounting is accomplished by welding or heat glueing. 
   
   
       5 . The package according to  claim 3 , wherein said valve-filter arrangement ( 6 ,  16 ) is directly integrated into the packaging. 
   
   
       6 . The package according to  claim 1 , wherein said valve-filter arrangement ( 6 ,  16 ) consists of a plastic tube ( 8 ) and a filter element ( 16 ) welded thereinto. 
   
   
       7 . The package according to  claim 1 , wherein the second bag is additionally provided with said valve-filter arrangement ( 6 ,  16 ). 
   
   
       8 . The package according to  claim 1 , wherein said plastic container is a Front Opening Shipping Box (FOSB). 
   
   
       9 . The package according to  claim 1 , wherein said tubing part ( 8 ) consists of a lower part ( 10 ) and a sealed upper part ( 12 ) closed at its top. 
   
   
       10 . The package according to  claim 1 , wherein said filter element ( 16 ) consists of a filter holder ( 18 ) and a filter sheet ( 20 ). 
   
   
       11 . The package according to  claim 10 , wherein said filter holder ( 18 ) is a U-shaped plastic tube ( 14 ). 
   
   
       12 . A method for packaging contamination vulnerable articles, comprising the steps of
 loading said articles into a closeable plastic container,   surrounding said container with a first plastic bag ( 4 ), and   surrounding said container and said first plastic bag with a second plastic bag,   wherein said first plastic bag ( 4 ) is provided with a valve-filter arrangement ( 6 ,  16 ) in order to allow a controlled air stream into said first bag ( 4 ) when opening said valve-filter arrangement ( 6 ,  16 ).   
   
   
       13 . The method according to  claim 12 , wherein said contamination vulnerable articles are semiconductor wafers. 
   
   
       14 . The method according to  claim 12 , wherein said second bag is additionally provided with said valve-filter arrangement ( 6 ,  16 ). 
   
   
       15 . The method according to  claim 12 , wherein said first bag ( 4 ) is opened by cutting off said sealed upper part ( 12 ).