Magnetic devices having magnetic features with CMP stop layers

Abstract

A magnetic device having a magnetic feature, the magnetic feature including a magnetic portion comprising a magnetic material, a region of non-magnetic material adjacent to the magnetic portion, and a stop layer disposed above the region of non-magnetic material, defining a planar upper boundary of the magnetic portion.

1 . A magnetic feature for use in a magnetic device, the magnetic feature comprising: 
 a magnetic portion comprising a magnetic material;    a region of non-magnetic material adjacent to the magnetic portion; and    a stop layer disposed above the region of non-magnetic material, defining a planar upper boundary of the magnetic portion.    
     
     
         2 . The magnetic feature of  claim 1 , wherein the magnetic portion has a width of less than about 300 nanometers and a height of less than about 300 nanometers.  
     
     
         3 . The magnetic feature of  claim 1 , wherein the stop layer comprises a non-magnetic material.  
     
     
         4 . The magnetic feature of  claim 1 , wherein the stop layer has a thickness ranging from about 2 nanometers to about 100 nanometers.  
     
     
         5 . The magnetic feature of  claim 4 , wherein the thickness of the top layer ranges from about 2 nanometers to about 10 nanometers.  
     
     
         6 . The magnetic feature of  claim 1 , wherein the stop layer is formed of a material selected from the group consisting of platinum, gold, chromium, ruthenium, diamond, tungsten, SiC, NiCu, and combinations thereof.  
     
     
         7 . The magnetic feature of  claim 1 , wherein the stop layer exhibits a removal rate selectivity versus both the non-magnetic material and the magnetic material of at least about eighty-to-one.  
     
     
         8 . The magnetic feature of  claim 1 , wherein the region of non-magnetic material is formed of an oxide material selected from the group consisting of aluminum oxide, silica dioxide, SiOxNy, and combinations thereof.  
     
     
         9 . A magnetic feature for use in a magnetic device, the magnetic feature comprising: 
 a magnetic portion comprising a magnetic material, and having a top surface;    an isolation layer coplanar with the magnetic portion, the isolation layer comprising a first non-magnetic material; and    a stop layer disposed above the isolation layer, the stop layer comprising a second non-magnetic material, and having a second top surface coplanar with the top surface of the magnetic portion.    
     
     
         10 . The magnetic feature of  claim 9 , wherein the magnetic portion has a width of less than about 300 nanometers and a height of less than about 300 nanometers.  
     
     
         11 . The magnetic feature of  claim 9 , wherein the second non-magnetic material comprises chromium.  
     
     
         12 . The magnetic feature of  claim 9 , wherein the stop layer exhibits a removal rate selectivity versus both the first non-magnetic material and the magnetic material of at least about eighty-to-one.  
     
     
         13 . The magnetic feature of  claim 9 , wherein the stop layer is configured to provide an endpoint detection for a chemical-mechanical polishing process.  
     
     
         14 . The magnetic feature of  claim 9 , wherein the first non-magnetic material is selected from the group consisting of aluminum oxide, silica dioxide, SiOxNy, and combinations thereof.  
     
     
         15 . A magnetic device comprising: 
 a substrate;    a magnetic portion disposed on the substrate;    a region of non-magnetic material disposed on the substrate adjacent to the magnetic portion; and    a stop layer disposed above the region of non-magnetic material and configured to provide an endpoint detection for a chemical-mechanical polishing process.    
     
     
         16 . The magnetic device of  claim 15 , wherein the magnetic portion has a width of less than about 300 nanometers and a height of less than about 300 nanometers.  
     
     
         17 . The magnetic device of  claim 15 , wherein the stop layer comprises a second non-magnetic material.  
     
     
         18 . The magnetic device of  claim 15 , wherein the stop layer is formed of a material selected from the group consisting of platinum, gold, chromium, ruthenium, diamond, tungsten, SiC, NiCu, and combinations thereof.  
     
     
         19 . The magnetic device of  claim 15 , wherein the stop layer exhibits a removal rate selectivity versus both the non-magnetic material and material of the magnetic portion of at least about eighty-to-one.  
     
     
         20 . The magnetic device of  claim 15 , wherein the substrate provides magnetic isolation properties for the magnetic device.