Aluminum electroplating formulations
Abstract
Electroplating electrolyte compositions including CA.(nAl(C 3 H 7 ) 3 (2−n)AlR 3 ) where n is 0 and less than or equal to 2; C is Li, Na, K, Rb, Cs, NR′ 4 , or mixtures thereof wherein R′ is H, CH 3 , C 2 H 5 , C 3 H 7 , C 4 H 9 , C 5 H 11 , C 6 H 13 , C 7 H 15 , C 8 H 17 , or mixtures thereof; A is H, F, Cl, Br, or mixtures thereof; R is H, halogen, CH 3 , C 2 H 5 , C 3 H 7 , C 4 H 9 , C 5 H 9 , C 5 H 11 , C 6 H 13 , C 7 H 15 , C 8 H 17 , or mixtures thereof; and an aromatic hydrocarbon, aliphatic hydrocarbon, or mixtures thereof are described. Aluminum and magnesium/aluminum electroplating compositions including C.(nAl(C 3 H 7 ) 4 (1−n)AlR 4 ) where n is 0 and less than or equal to 1, where C is a cation such as li, Na, K, Rb, Cs, or mixtures thereof; R is H or an alkyl such as CH 3 , C 2 H 5 , C 3 H 7 , C 4 H 9 , C 5 H 9 , C 5 H 11 , C 6 H 13 , C 7 H 15 , C 8 H 17 , or mixtures thereof are also described. The aluminum and magnesium/aluminum electroplating compositions formulation can include a solvent such as, an aromatic hydrocarbon aliphatic hydrocarbon, or mixtures thereof.
Claims
exact text as granted — not AI-modified1 . An electroplating composition comprising:
CA.( n Al(C 3 H 7 ) 3 (2− n )AlR 3 ) wherein: n is greater than 0 and less than or equal to 2; C is Li, Na, K, Rb, Cs, NR 1 4 to mixtures thereof wherein R 1 is a C 1 -C 8 alkyl or mixtures thereof; A is H, F, Cl, Br, or mixtures thereof; R is H, halogen, a C 1 -C 8 alkyl or mixtures thereof; and an aromatic hydrocarbon, aliphatic hydrocarbon, or mixtures thereof.
2 . The composition according to claim 1 , wherein C is Na, K, NR 1 4, or mixtures thereof.
3 . The composition according to claim 1 , wherein A is F.
4 . The composition according to claim 1 , wherein A is Cl.
5 . The composition according to claim 3 , wherein C is Li, Na, K, Rb, Cs, or mixtures thereof.
6 . The composition according to claim 4 , wherein C is NR 1 4.
7 . The composition according to claim 1 , wherein the aromatic hydrocarbon is toluene, xylene, tetraline or mixtures thereof.
8 . The composition according to claim 1 , wherein;
C is 1 M K; A is 1 M F; n is 1.6; R is CH 3 and the aromatic hydrocarbon is tetraline.
9 . The composition according to claim 1 , wherein;
C is 0.6 M K and 0.4 M tetraalkylammonium; A is 0.6 M F and 0.4 M Cl, n is 0.6; R is C 2 H 5 and di-iso-butyl hydride; and the aromatic hydrocarbon is toluene.
10 . The composition according to claim 1 , wherein;
C is 1 M Na; A is 1 M H; n is 1.1; R is C 2 H 5 ; and the aromatic hydrocarbon is toluene.
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