Particle producing method and particle producing apparatus

Abstract

A particle producing apparatus includes a reaction container, an introduction portion for introducing a source gas and a reaction inhibitor generating gas into the reaction container, an inert gas introduction portion for introducing a carrier gas into the reaction container, a heater provided on the reaction container, and an exhaust portion. The growth of particles is controlled using a particle producing reaction and a reverse reaction.

1 - 17 . (canceled)  
     
     
         18 . A particle producing apparatus comprising: 
 a reaction container;    an introduction portion provided at one end of the reaction container, the introduction portion through which a source gas, a reaction inhibitor generating gas, and a carrier gas are introduced into the reaction container;    a heater provided on an outer wall of the reaction container;    an exhaust portion configured to exhaust the carrier gas and produced particles from the other end of the reaction container;    a cooler configured to cool the produced particles exhausted from the exhaust portion; and    a storage portion configured to store the produced particles from the cooler.    
     
     
         19 . The particle producing apparatus according to  claim 18 , wherein the reaction inhibitor generating gas includes hydrogen and carbon dioxide.