Evaporation apparatus, evaporation method, method of manufacturing electro-optical device, and film-forming apparatus

Abstract

An evaporation apparatus includes a deposition unit that deposits a substance to be evaporated from an evaporation source on a substrate, a vacuum tank that defines a space for placing the evaporation source and the substrate and maintains a vacuum state in the space, and an evaporated substance adhering unit that is provided in at least a portion of a wall in the vacuum tank and has a plurality of protrusions protruding in a direction toward the evaporation source at an angle relative to a direction normal to the wall, and to which the evaporated substance is adhered.

1 . An evaporation apparatus comprising:
 a deposition unit that deposits a substance to be evaporated from an evaporation source onto a substrate;   a vacuum tank that defines a space for placing the evaporation source and the substrate and maintains a vacuum state in the space; and   an evaporated substance adhering unit that is provided in at least a portion of a wall in the vacuum tank and has a plurality of protrusions protruding in a direction toward the evaporation source at an angle relative to a direction normal to the wall, and to which the evaporated substance is adhered.   
   
   
       2 . The evaporation apparatus according to  claim 1 ,
 wherein the evaporation source is disposed at a bottom surface of the vacuum tank, and   the plurality of protrusions are arranged at a side portion of the wall in multiple lines along a direction crossing a direction normal to the bottom surface.   
   
   
       3 . The evaporation apparatus according to  claim 1 ,
 wherein the evaporation source is disposed at a bottom surface of the vacuum tank, and   the plurality of protrusions are formed at a side portion of the wall to extend along a direction crossing a direction normal to the bottom surface.   
   
   
       4 . The evaporation apparatus according to  claim 2 ,
 wherein the side portion of the wall is adjacent to the bottom surface.   
   
   
       5 . An evaporation apparatus comprising:
 an evaporation unit that deposits a substance to be evaporated from an evaporation source on a substrate;   a vacuum tank that defines a space for placing the substrate and the evaporation source and maintains a vacuum state in the space; and   an evaporated substance adhering unit that is provided in at least a portion of a wall of the vacuum tank and has a plurality of concave portions to be depressed with respect to the evaporation source in a direction toward the evaporation source at an angle relative to a direction normal to the wall, and to which the evaporated substance is adhered.   
   
   
       6 . The evaporation apparatus according to  claim 5 ,
 wherein a space that is defined by an inner surface of each of the plurality of concave portions has a space extending along the direction toward the evaporation source.   
   
   
       7 . The evaporation apparatus according to  claim 5 ,
 wherein the evaporation source is disposed at a bottom surface of the vacuum tank, and   the plurality of concave portions are arranged at a side portion of the wall of the vacuum tank in multiple lines along a direction crossing a direction normal to the bottom surface.   
   
   
       8 . The evaporation apparatus according to  claim 5 ,
 wherein the evaporation source is disposed at a bottom surface of the vacuum tank, and   the plurality of concave portions are formed at a side portion of the wall of the vacuum tank to extend along a direction crossing a direction normal to the bottom surface.   
   
   
       9 . The evaporation apparatus according to  claim 7 ,
 wherein the side portion of the wall is adjacent to the bottom surface.   
   
   
       10 . An evaporation apparatus comprising:
 an evaporation unit that deposits a substance to be evaporated from an evaporation source on a substrate;   a vacuum tank that defines a space for placing the substrate and the evaporation source and maintains a vacuum state in the space; and   an evaporated substance adhering unit that is provided in at least a portion of a wall of the vacuum tank and has a mesh-shaped concavo-convex portion with respect to the wall, and to which the evaporated substance is adhered.   
   
   
       11 . An evaporation apparatus comprising:
 an evaporation unit that deposits a substance to be evaporated from an evaporation source on a substrate;   a vacuum tank that defines a space for placing the substrate and the evaporation source and maintains a vacuum state in the space; and   an evaporated substance adhering unit that is provided in at least a portion of a wall of the vacuum tank and has a lattice-shaped convex portion with respect to the wall, and to which the evaporated substance is adhered.   
   
   
       12 . The evaporation apparatus according to  claim 10 ,
 wherein the evaporated substance adhering unit is disposed to be at least partially spaced at a predetermined gap from the wall.   
   
   
       13 . A film-forming apparatus comprising:
 a film-forming unit that deposits released particles from a target on a substrate so as to form a thin film on the substrate;   a shield member that is provided between the target and the substrate and has an opening through which the released particles pass; and   a released particle adhering unit that is provided in at least a portion of a surface of the shield member and has a plurality of protrusions protruding from the surface, and to which the released particles are adhered.   
   
   
       14 . A film-forming apparatus comprising:
 a film-forming unit that deposits released particles from a target on a substrate so as to form a thin film on the substrate;   a shield member that is provided between the target and the substrate and has an opening through which the released particles pass; and   a released particle adhering unit that is provided in at least a portion of a surface of the shield member and has a plurality of concave portions to be depressed from the surface, and to which the released particles are adhered.   
   
   
       15 . A film-forming apparatus comprising:
 a film-forming unit that deposits released particles from a target on a substrate so as to form a thin film on the substrate;   a shield member that is provided between the target and the substrate and has an opening through which the released particles pass; and   a released particle adhering unit that is provided in at least a portion of a surface of the shield member and has a mesh-shaped concavo-convex portion with respect to the surface, and to which the released particles are adhered.   
   
   
       16 . A film-forming apparatus comprising:
 a film-forming unit that deposits released particles from a target on a substrate so as to form a thin film on the substrate;   a shield member that is provided between the target and the substrate and has an opening through which the released particles pass; and   a released particle adhering unit that is provided in at least a portion of a surface of the shield member and has a lattice-shaped convex portion with respect to the surface, and to which the released particles are adhered.   
   
   
       17 . The evaporation apparatus according to  claim 1 , the evaporated substance adhering unit being provided at an angle within a range of angles of imaginary lines extending from a jig that holds the evaporation source to the wall.