Transfer pick, transfer device, substrate processing apparatus and transfer pick cleaning method

Abstract

A transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate includes a substrate support surface for supporting the substrate thereon; a plurality of contact members protruded from the substrate support surface to contact with the substrate; and a voltage applying unit for charging the contact members with electricity. Further, the transfer pick has a self-cleaning function of removing particles adhered to the contact members by using repulsive force of an electric charge. In addition, a computer readable memory medium storing a computer executable control program, wherein the control program controls a substrate processing apparatus to perform the transfer pick cleaning method.

1 . A transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate, the transfer pick comprising:
 a substrate support surface for supporting the substrate thereon;   a plurality of contact members protruded from the substrate support surface to contact with the substrate; and   a voltage applying unit for charging the contact members with electricity,   wherein the transfer pick has a self-cleaning function of removing particles adhered to the contact members by using repulsive force of an electric charge.   
   
   
       2 . The transfer pick of  claim 1 , further including a conductive member and an insulation member covering the conductive member,
 wherein the voltage applying unit is electrically connected to the conductive member, and applies a positive or a negative voltage to the conductive member.   
   
   
       3 . A transfer device comprising the transfer pick of  claim 1 . 
   
   
       4 . A substrate processing apparatus comprising:
 a processing chamber, in which a substrate is processed; and   a transfer chamber having therein a transfer device to transfer the substrate into the processing chamber,   wherein the transfer device includes the transfer pick of  claim 1 .   
   
   
       5 . A substrate processing apparatus comprising:
 a vacuum processing chamber, in which a substrate is processed;   a transfer chamber having therein a transfer device to transfer the substrate into the vacuum processing chamber, wherein the transfer device includes a transfer arm and a transfer pick provided at a leading end of the transfer arm, the transfer pick having a plurality of contact members protruded from a substrate support surface for supporting the substrate thereon;   a load lock chamber provided between the vacuum processing chamber and the transfer chamber; and   an electric charging unit for supplying charged particles to the contact members to forcibly charge the contact members with electricity.   
   
   
       6 . The substrate processing apparatus of  claim 5 , wherein the electric charging unit applies a voltage to the contact members such that the contact members are charged with electricity having a polarity equal to that of particles adhered to the contact members. 
   
   
       7 . The substrate processing apparatus of  claim 5 , wherein the electric charging unit is disposed in the transfer chamber. 
   
   
       8 . The substrate processing apparatus of  claim 7 , wherein an air stream generator and an exhaust device are provided in the transfer chamber, the air stream generator being used for generating an air stream in the transfer chamber and the exhaust device being used for exhausting an inside of the transfer chamber, and
 the electric charging unit is disposed downstream of a substrate transfer position of the transfer device in a direction of the air stream.   
   
   
       9 . The substrate processing apparatus of  claim 5 , wherein the electric charging unit is installed in a cleaning chamber provided adjacent to the transfer chamber. 
   
   
       10 . The substrate processing apparatus of  claim 9 , wherein an air stream generator and an exhaust device are provided in the cleaning chamber, the air stream generator being used for generating an air stream in the cleaning chamber and the exhaust device being used for exhausting an inside of the cleaning chamber. 
   
   
       11 . The substrate processing apparatus of  claim 5 , wherein the electric charging unit is disposed in the load lock chamber. 
   
   
       12 . A transfer pick cleaning method for use in a substrate processing apparatus including a transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate, the transfer pick having: a substrate support surface to support the substrate thereon; a plurality of the contact members protruded from the substrate support surface to contact with the substrate; and a voltage applying unit for charging the contact members with electricity, the transfer pick cleaning method comprising:
 a cleaning process of repeatedly and alternately applying a positive and a negative voltage to the contact members by using the voltage applying unit to thereby forcibly charge the contact members such that an electric polarity thereof is repeatedly switched between a positive and a negative polarity,   wherein particles adhered to the contact members are removed by repulsive force of electric charges.   
   
   
       13 . A transfer pick cleaning method for use in a substrate processing apparatus including a transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate, the transfer pick having: a substrate support surface to support the substrate thereon; and a plurality of contact members protruded from the substrate support surface to contact with the substrate, the transfer pick cleaning method comprising:
 a cleaning process of forcibly charging the contact members with electricity by using an electric charging unit supplying charged particles to contact members such that an electric polarity of the contact members is repeatedly switched between a positive and a negative polarity, thereby removing particles adhered to the contact members by repulsive force of electric charges.   
   
   
       14 . The transfer pick cleaning method of  claim 12 , wherein the cleaning process is performed during a time period in which the transfer device of the substrate processing apparatus is at an idle. 
   
   
       15 . The transfer pick cleaning method of  claim 13 , wherein the cleaning process is performed during a time period in which the transfer device of the substrate processing apparatus is at an idle. 
   
   
       16 . The transfer pick cleaning method of  claim 12 , wherein an air stream is generated by an air stream generator in a chamber at which the transfer pick is provided, during the cleaning process. 
   
   
       17 . The transfer pick cleaning method of  claim 13 , wherein an air stream is generated by an air stream generator in a chamber at which the transfer pick is provided, during the cleaning process. 
   
   
       18 . The transfer pick cleaning method of  claim 16 , wherein the substrate processing apparatus includes:
 a vacuum processing chamber, in which a substrate is processed;   a transfer chamber having therein the transfer device to transfer the substrate into the processing chamber; and   a load lock chamber, provided between the vacuum processing chamber and the transfer chamber,   wherein the cleaning process is performed in the transfer chamber or the load lock chamber.   
   
   
       19 . The transfer pick cleaning method of  claim 17 , wherein the substrate processing apparatus includes:
 a vacuum processing chamber, in which a substrate is processed;   a transfer chamber having therein the transfer device to transfer the substrate into the processing chamber; and   a load lock chamber, provided between the vacuum processing chamber and the transfer chamber,   wherein the cleaning process is performed in the transfer chamber or the load lock chamber.   
   
   
       20 . The transfer pick cleaning method of  claim 12 , further comprising, after the cleaning process, a process of controlling a charged state of the contact members. 
   
   
       21 . The transfer pick cleaning method of  claim 13 , further comprising, after the cleaning process, a process of controlling a charged state of the contact members. 
   
   
       22 . A computer executable control program for controlling, when executed, a substrate processing apparatus to execute the transfer pick cleaning method of  claim 12 . 
   
   
       23 . A computer executable control program for controlling, when executed, a substrate processing apparatus to execute the transfer pick cleaning method of  claim 13 . 
   
   
       24 . A computer readable memory medium storing a computer executable control program, wherein the control program controls a substrate processing apparatus to execute the transfer pick cleaning method of  claim 12 . 
   
   
       25 . A computer readable memory medium storing a computer executable control program, wherein the control program controls a substrate processing apparatus to execute the transfer pick cleaning method of  claim 13 .