Probe, probe card, and testing device

Abstract

An object is to provide a probe, a probe card, and a testing device which can precisely perform a test for conductive state of a conductive wiring in, for example, a through hole or a contact hole provided in a circuit board. Provided is a probe ( 10 ) for performing a test for conductivity of a conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board. The probe ( 10 ) is provided with an elastically deformable leg portion ( 11 ) and a contact portion ( 13 ) provided on a tip side of the leg portion ( 11 ) to be brought into contact with the conductive wiring ( 21 ) provided in a through hole ( 22 ). The contact portion ( 13 ) is formed to be in a shape and size so as to be prevented from entering the through hole ( 22 ).

1 . A probe performing a test for conductivity of a conductive wiring in a hole provided in a circuit board, comprising: 
 a long and elastically deformable leg portion; and    a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself,    wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.    
   
   
       2 . A probe in order to determine a state of a hole provided in a circuit board, comprising: 
 a long and elastically deformable leg portion; and    a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring with the elasticity possessed by the probe itself,    wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.    
   
   
       3 . The probe according to  claim 1 , 
 wherein the contact portion is formed in the shape of an arc larger than a diameter of the hole.    
   
   
       4 . The probe according to  claim 1 , 
 wherein the contact portion is formed by folding the tip side of the leg portion.    
   
   
       5 . The probe according to  claim 1 , 
 wherein a contact surface of the contact portion which is brought into contact with the conductive wiring is formed to have a flat surface in parallel with a surface of the circuit board to be tested.    
   
   
       6 . The probe according to  claim 1 , 
 wherein the contact portion is formed to be linear in shape, which is in parallel with a surface of the circuit board to be tested and longer than a diameter of the hole.    
   
   
       7 . (canceled)  
   
   
       8 . The probe according to  claim 6 , 
 wherein the contact portion is a conductive part joined to a tip of the leg portion.    
   
   
       9 . The probe according to  claim 1 , 
 wherein a contact surface of the contact portion which is brought into contact with the conductive wiring is given a rough shape like an abrasion mark extending in a direction to cross a longitudinal direction of the contact portion.    
   
   
       10 . A probe card having a probe performing a test for conductive state of conductive wiring in a hole such as a through hole or a contact hole provided in a circuit board, 
 the probe comprising:    a long and elastically deformable leg portion; and    a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself    wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.    
   
   
       11 . A testing device performing a test of conductive state of a conductive wiring in a hole provided in a circuit board, comprising: 
 a probe card having a probe to be brought into contact with the conductive wiring;    a holding device holding the circuit board;    a position detecting device detecting whether or not the circuit board is disposed in a predetermined position;    a position adjusting device adjusting a position of the circuit board based on a result of the detection by the position detecting device; and    a resistance measuring device measuring a resistance of the inner periphery of the hole and a resistance between both ends of the conductive wiring, with the probe,    wherein the probe includes:    a long and elastically deformable leg portion; and    a contact portion provided on a tip side of the leg portion to be brought into contact with the conductive wiring, with the elasticity possessed by the probe itself    wherein the contact portion is formed to be in a shape or size so as to be prevented from entering the hole.    
   
   
       12 . The testing device according to  claim 11 , 
 wherein the probe card is provided with a plurality of probes and    the position adjusting device includes a rotational position adjusting device adjusting a rotational position of the probe card.