US2007223804A1PendingUtilityA1

CAM reference for inspection of contour images

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Assignee: ORBOTECH LTDPriority: Dec 23, 1999Filed: Apr 20, 2007Published: Sep 27, 2007
Est. expiryDec 23, 2019(expired)· nominal 20-yr term from priority
Inventors:Tally Gilat-BernshteinZeev Gutman
G01N 21/95684G01N 2021/95638G01N 2021/95615G01R 31/311G01N 21/95607G06T 2207/30148G06T 7/0006
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Claims

Abstract

This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.

Claims

exact text as granted — not AI-modified
1 . An electrical circuit inspection system comprising: 
 an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions; and    an analysis subsystem for analyzing said inspection output, said analyzing including comparing said inspection output with a computer file reference identifying more than two different types of regions.    
   
   
       2 - 77 . (canceled)

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